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首页> 外文期刊>Japanese journal of applied physics >Femtosecond Laser Ablation Of Frozen Alcohols For Deposition Of Diamond-like Carbon Thin Films
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Femtosecond Laser Ablation Of Frozen Alcohols For Deposition Of Diamond-like Carbon Thin Films

机译：飞秒激光烧蚀冷冻酒精以沉积类金刚石碳薄膜

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摘要

A 790nm, 130 fs Ti:sapphire laser pulse ablated various frozen alcohols (C_nH_(2n+1)OH, n = 1-6) to deposit diamond-like carbon (DLC) thin films. The larger the carbon number (n) of the alcohols, the higher the hydrogen content of the DLC films; the sp~3 carbon content ranged from 35 to 45%. The hydrogen content caused a change in the optical band gap of the films. Moreover, the deposition rate of the films increased linearly as the carbon number increased. The deposition rate did not simply relate to the amount of carbon species ejected from the frozen alcohols. Even though carbon species were largely generated, the ejected oxygen radicals etched the carbon to lower the deposition rate. When we used frozen benzene as a laser target, DLC thin films were not deposited. By dissolving boric acid in an alcohol, we could deposit boron-doped DLC thin films.
机译：790nm，130fs的Ti：蓝宝石激光脉冲烧蚀各种冷冻的醇（C_nH_（2n + 1）OH，n = 1-6）以沉积类金刚石碳（DLC）薄膜。醇的碳数（n）越大，DLC膜的氢含量越高； sp〜3的碳含量为35％至45％。氢含量引起薄膜的光学带隙的变化。此外，膜的沉积速率随着碳数的增加而线性增加。沉积速率不仅仅与从冷冻醇中喷出的碳种类的数量有关。即使大量产生碳物质，喷出的氧自由基也会腐蚀碳以降低沉积速率。当我们使用冷冻苯作为激光靶时，没有沉积DLC薄膜。通过将硼酸溶解在酒精中，我们可以沉积硼掺杂的DLC薄膜。

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