Measurement of Optical Constants for Molten Phase-Change Thin Film

Daisuke ETO; Kazuhiko AOKI; Shuichi OHKUBO

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Measurement of Optical Constants for Molten Phase-Change Thin Film

机译：熔融相变薄膜的光学常数的测量

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The measurement of optical constants for molten phase-change thin film is a key issue in designing super-resolution media. We have succeeded in the stable measurement for the first time. In our measurements, phase-change thin film was sandwiched between metal oxide protective thin films, which remain stable over the melting point of phase-change material. The stability of this measurement was confirmed by the repeatability of the temperature dependence of transmittance and reflectance, and transmission electron microscopy (TEM) observation.

机译：熔融相变薄膜的光学常数的测量是设计超分辨率介质的关键问题。我们首次成功实现了稳定的测量。在我们的测量中，将相变薄膜夹在金属氧化物保护薄膜之间，该薄膜在相变材料的熔点范围内保持稳定。该测量的稳定性通过透射率和反射率的温度依赖性的重复性以及透射电子显微镜（TEM）的观察来确认。

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《Japanese journal of applied physics》 |2008年第7issue2期|6039-6041|共3页
作者
Daisuke ETO; Kazuhiko AOKI; Shuichi OHKUBO;
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super-resolution optical disc; optical constants; molten phase-change thin film; metal oxide protective thin films; transmission electron microscopy (TEM) observation;

机译：超分辨率光盘光学常数熔融相变薄膜金属氧化物保护薄膜;透射电子显微镜（TEM）观察;

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机译：溅射铍薄膜的光学常数从光谱范围内的光吸收测量确定20.4-250eV
2. Determination of the optical constants of thin films based on normal-incidence reflectance measurements [J] . Hamh S.Y., Han J.W., Kim T.H., Journal of the Korean Physical Society . 2013,第2期

机译：基于法向入射反射率测量的薄膜光学常数的确定
3. Calculation of the Optical Constants of Amorphous Semiconducting As₄₀s_60,As₄₀s₃₅se₂₅and As₄₀se₆₀ Thin Films from Transmittance and Reflectance Measurements [J] . E.R. Shaaban Journal of Applied Sciences . 2006,第2期

机译：作为<亚> 40 S _{60，_{为_{40 s _{35 se _{25的无定形半导体光学常数的计算和作为_{40 se _{60 透射率和反射测量的薄膜}}}}}}}
4. Semiconductor thin-film optical constant determination and thin-film thickness measurement equipment correlation [C] . Anne M. Kaiser, Digital Equipment Corp., Marlborough, Integrated Circuit Metrology, Inspection, and Process Control V . 1991

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5. Exploratory synthesis in molten salts: Characterization, nonlinear optical and phase-change properties of new chalcophosphate compounds. [D] . Chung, In. 2008

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7. System offers rapid, low-cost measurement of thickness and optical constants of thin films [O] . 2011

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Measurement of Optical Constants for Molten Phase-Change Thin Film

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