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首页> 外文期刊>Japanese Journal of Applied Physics. Part 1, Regular Papers, Brief Communications & Review Papers >Resin Material Dependence of Pit Shape in Thermal Direct Mastering
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Resin Material Dependence of Pit Shape in Thermal Direct Mastering

机译：热直接控制中基坑形状的树脂材料依赖性

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摘要

We report the resin material dependence of the shape of pits obtained by thermal direct mastering (TDM), which is a heat-mode mastering method utilizing the thermal decomposition of resins. By applying suitable resins, both circular and crescent pits can be obtained by TDM. This difference in shape was considered to originate from the temperature difference between the glass transition temperature and the thermal decomposition temperature of the resins. The resin with a relatively small temperature difference was suitable for the fabrication of the circular pits and random patterns, and the resin with a large temperature difference was suitable for the fabrication of the crescent pits and monotone patterns with high linear density. By using a deep ultraviolet (DUV) laser mastering system with a wavelength of 257 nm and a numerical aperture of 0.90, a monotone pattern of 40-nm-length pits was fabricated by applying a novolak-type resin with a relatively large temperature difference.
机译：我们报告了通过热直接控制（TDM）获得的凹坑形状对树脂材料的依赖性，该方法是利用树脂的热分解的热模式控制方法。通过施加合适的树脂，可以通过TDM获得圆形凹坑和新月凹坑。认为该形状差异是由于玻璃化转变温度与树脂的热分解温度之间的温度差引起的。温差较小的树脂适合于圆形凹坑和无规图案的制造，温差较大的树脂适合于月牙形凹坑和线性密度高的单调图案的制造。通过使用波长为257 nm，数值孔径为0.90的深紫外（DUV）激光母版制作系统，通过施加具有相对较大温差的线型酚醛清漆型树脂，可以制造出长度为40 nm的凹坑的单调图案。

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