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首页> 外文期刊>Japanese Journal of Applied Physics. Part 1, Regular Papers, Brief Communications & Review Papers >Concept and Demonstration of Individual Probe Actuation in Two-Dimensional Parallel Atomic Force Microscope System
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Concept and Demonstration of Individual Probe Actuation in Two-Dimensional Parallel Atomic Force Microscope System

机译：二维平行原子力显微镜系统中单个探针驱动的概念和演示

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摘要

A concept of an array actuator that is used to control the tip-sample separation of cantilevers in a two-dimensional (2D) probe array scanning system is proposed in this article. The feasibility of the concept is demonstrated with a 10 × 10 array actuator with 500 μm xy-pitches. The array actuator is made by slicing a bulk piezoceramic block. The obtained maximum actuation of a single probe was 2.19 μm_(p-p) at ±168 V_(p-p). A major issue for the actuator was the insufficient strength of the frame of the probe array chip. The demonstrated array actuator is highly compatible with previously developed parallel readout modules that use either a parallel optical beam or integrated piezoresistive deflection sensing. A large-scale 2D probe array is our ultimate target.
机译：本文提出了一种阵列致动器的概念，该阵列致动器用于控制二维（2D）探针阵列扫描系统中悬臂的尖端样品分离。带有500μmxy节距的10×10阵列执行器证明了该概念的可行性。阵列致动器是通过切块压电陶瓷块制成的。在±168 V_（p-p）时，单个探头的最大驱动力为2.19μm_（p-p）。致动器的主要问题是探针阵列芯片的框架强度不足。演示的阵列执行器与以前开发的使用并行光束或集成压阻偏转传感的并行读出模块高度兼容。大型二维探头阵列是我们的最终目标。

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