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首页> 外文期刊>Japanese journal of applied physics >The Effect of Metal-Film Thickness on Pattern Formation by Using Direct Imprint
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The Effect of Metal-Film Thickness on Pattern Formation by Using Direct Imprint

机译：金属膜厚度对直接压印图案形成的影响

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This paper presents the use of the three-dimensional (3D) molecular dynamics (MD) simulation to demonstrate the direct imprint behavior between the metallic film and mold. The simulation considers the interaction of the mold and the defect-free metallic film during direct imprint process. The mold and the metallic film are made of nickel and aluminum, respectively, and are arranged in face-centered cubic (fcc) single crystal structures. Different imprint simulation conditions are implemented by changing the thickness of metal film; the formation mechanism, the hydrostatic phenomenon and the stress distribution of the metallic film are investigated. The imprint force applied to the mold, plastic atom ratio, and the formation ratios are calculated during direct imprint process. The relationship between the film thickness and the substrate effect are also investigated.
机译：本文介绍了使用三维（3D）分子动力学（MD）模拟来演示金属膜和模具之间的直接压印行为。模拟考虑了直接压印过程中模具和无缺陷金属膜的相互作用。模具和金属膜分别由镍和铝制成，并以面心立方（fcc）单晶结构排列。通过改变金属膜的厚度来实现不同的压印模拟条件。研究了金属膜的形成机理，静水现象和应力分布。在直接压印过程中计算施加到模具上的压印力，塑料原子比和成型比。还研究了膜厚度和基底效应之间的关系。

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