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首页> 外文期刊>Japanese Journal of Applied Physics. Part 1, Regular Papers, Brief Communications & Review Papers >Surface Acoustic Wave Based Pressure Sensor with Ground Shielding over Cavity on 41° YX LiNbO_3
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Surface Acoustic Wave Based Pressure Sensor with Ground Shielding over Cavity on 41° YX LiNbO_3

机译：基于表面声波的压力传感器，在41°YX LiNbO_3上具有腔体接地屏蔽

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摘要

A surface acoustic wave (SAW)-based pressure sensor was fabricated for stable mechanical compression force measurement. A single phase unidirectional transducer (SPUDT) and two acoustic tracks were employed to minimize inherent insertion loss and improve reflectivity from the reflectors. The coupling of modes (COM) theory and finite element methods (FEMs) were used to determine optimal design parameters. A LiNbO_3 diaphragm was bonded to a heavily doped silicon substrate with a cavity of ～250 蘭 deep, in which gold was lined all over the inner cavity to reduce the coupling loss of SAW energy to the surrounding atmosphere. As a mechanical compression force was applied to the diaphragm, the diaphragm bent, resulting in phase shifts of the reflected peaks. The phase shifts were modulated depending on the amount of mechanical compression applied. The measured reflection coefficient S_(11) showed good agreement with simulated results.
机译：制作了基于表面声波（SAW）的压力传感器，用于稳定的机械压缩力测量。采用单相单向换能器（SPUDT）和两个声轨，以最小化固有的插入损耗并提高反射器的反射率。模式（COM）理论与有限元方法（FEM）的耦合用于确定最佳设计参数。将LiNbO_3膜片粘结到一个重掺杂的硅衬底上，该衬底的腔深约250兰，其中在整个内腔中衬有金，以减少SAW能量与周围大气的耦合损耗。当向膜片施加机械压力时，膜片弯曲，导致反射峰的相移。根据所施加的机械压缩量来调制相移。实测反射系数S_（11）与模拟结果吻合良好。

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