Distinct Fine and Coarse Ripples on 4H-SiC Single Crystal Induced by Femtosecond Laser Irradiation

Takuro Tomita; Keita Kinoshita; Shigeki Matsuo; Shuichi Hashimoto

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Distinct Fine and Coarse Ripples on 4H-SiC Single Crystal Induced by Femtosecond Laser Irradiation

机译：飞秒激光辐照在4H-SiC单晶上产生明显的细和粗波纹

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Upon femtosecond pulsed-laser irradiation, periodic structures referred to as "ripples" were fabricated on the surface of a 4H-SiC single crystal. The periodic structures consisted of two concentric regions in the irradiated spots which were clearly distinguished by the period. Surface morphologies were characterized as a function of energy, accumulation number, and interval of pulses. The difference in the threshold of fine and coarse ripples was identified for the first time. The possible formation mechanisms of these structures were discussed.

机译：飞秒脉冲激光辐照后，在4H-SiC单晶的表面上形成了称为“波纹”的周期性结构。周期性结构由辐照斑点中的两个同心区域组成，这些同心区域由周期明显区分。表面形貌被表征为能量，累积数和脉冲间隔的函数。首次确定了细纹和粗纹纹波阈值的差异。讨论了这些结构的可能形成机理。

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来源
《Japanese Journal of Applied Physics. Part 2, Letters & Express Letters》 |2006年第16期|p.L444-L446|共3页
作者
Takuro Tomita; Keita Kinoshita; Shigeki Matsuo; Shuichi Hashimoto;
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作者单位

Department of Ecosystem Engineering, The University of Tokushima, Tokushima 770-8506, Japan;

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原文格式 PDF
正文语种 eng
中图分类应用物理学;
关键词
ripple; 4H-SiC; femtosecond laser; ablation;

机译：波纹;4H-SiC;飞秒激光;烧蚀;

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1. Progressive formation of fine and coarse ripples on SiC surface by repeated irradiation of femtosecond laser pulses [J] . S. H. Kim, K. H. Byun, I. B. Sohn, Applied physics . 2013,第3期

机译：飞秒激光脉冲的反复辐照在SiC表面上逐渐形成细微和粗糙的波纹
2. Formation of slantwise orientated nanoscale ripple structures on a single-crystal 4H-SiC surface by time-delayed double femtosecond laser pulses [J] . Wanlin He, Jianjun Yang Applied Physics . 2017,第8期

机译：时延双飞秒激光脉冲在单晶4H-SiC表面上形成倾斜取向的纳米级波纹结构
3. TEM Observation of Structural Changes under 4H-SiC Single Crystal Surface Irradiated by Femtosecond Laser Pulses [J] . Tatsuya OKADA, Hiroyuki KAWAHARA, Ryota KUMAI, 技研所報 . 2008,第2期

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4. Cross-Sectional TEM Analysis of Structural Change in 4H-SiC Single Crystal Irradiated by Femtosecond Laser Pulses [C] . Hiroyuki Kawahara, Tatsuya Okada, Ryota Kumai, Silicon Carbide and Related Materials 2007 . 2009

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7. Analysis of strained surface layers of ZnO single crystals after irradiation with intense femtosecond laser pulses [O] . Schneider Andreas, Wolverson Daniel, Sebald Katrin, 2013

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8. Laser-Induced Surface Ablation and Optical Damage of ZnS Crystals Caused by Single- and Multiple-Pulse Laser-Irradiation. [R] . Arlinghaus, H. F., Calaway, W. F., Gruen, D. M., 1989

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Distinct Fine and Coarse Ripples on 4H-SiC Single Crystal Induced by Femtosecond Laser Irradiation

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