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首页> 外文期刊>Japanese Journal of Applied Physics. Part 1, Regular Papers, Brief Communications & Review Papers >Practical Electron Beam Recorder for High-Density Optical and Magnetic Disk Mastering
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Practical Electron Beam Recorder for High-Density Optical and Magnetic Disk Mastering

机译：实用的电子束记录仪，用于高密度光盘和磁盘母版制作

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摘要

Electron beam mastering is a promising technique to realize next-generation disk media. We have been developing electron beam recorders since 1993 and have proved their effectiveness for high-density disk fabrication. To introduce electron beam mastering technology into practical application in next-generation disk mastering, we developed a new electron beam recorder as a commercial prototype. The electron beam recorder was improved in terms of recording resolution, beam-blanking characteristic and recording stability. For production use, a load-lock system was adopted to improve throughput, and the recording and substrate exchange operations were automated through computer control. The recording stability was proved experimentally by fabricating 100-GB-capacity stampers recorded on the whole recording area of 22 to 58 mm radius with a good pattern size uniformity. A superhigh-density patterning of 350 Gbit/in.~2 density (510 GB capacity/layer) was realized for the next-generation optical disk, and a 35 nm line and space pattern could be fabricated for the next-generation magnetic disk.
机译：电子束母带化是实现下一代磁盘介质的有前途的技术。自1993年以来，我们一直在开发电子束记录器，并证明了其在高密度磁盘制造中的有效性。为了将电子束母版处理技术引入下一代磁盘母版处理的实际应用中，我们开发了一种新型电子束记录仪作为商业原型。电子束记录器在记录分辨率，电子束消隐特性和记录稳定性方面得到了改善。对于生产用途，采用了负载锁定系统以提高生产量，并且记录和基板更换操作通过计算机控制实现自动化。通过制造在半径为22至58 mm的整个记录​​区域上记录的100 GB容量的压模，具有良好的图案尺寸均匀性，通过实验证明了记录的稳定性。对于下一代光盘，实现了350 Gbit / in。〜2密度（510 GB容量/层）的超高密度图案化，并且可以为下一代磁盘制作35 nm的线和间隔图案。

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