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首页> 外文期刊>Japanese Journal of Applied Physics. Part 2, Letters & Express Letters >Fluorinated Diamond-Like Carbon Coating as Antisticking Layer on Nanoimprint Mold
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Fluorinated Diamond-Like Carbon Coating as Antisticking Layer on Nanoimprint Mold

机译：纳米压印模具上的氟化类金刚石碳涂层作为防粘层

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摘要

Fluorinated diamond-like carbon (F-DLC) has recently been applied as an antisticking layer on nanoimprint molds for semipermanent use, replacing the self-assembled monolayer currently used. An SiO_2/Si mold was successfully coated with an F-DLC thin layer by chemical vapor deposition (CVD). The measured water contact angle of the F-DLC surface was 103°, which is 30° higher than that of the DLC surface. This value indicates the adequacy of F-DLC as an antisticking layer. Moreover, an F-DLC film had a high hardness of 24 GPa, similar to that of a DLC film (26 GPa). AZ resist patterns of 150 nm linewidth and 350 nm pitch were successfully obtained by thermal nanoimprinting using an F-DLC-coated mold. Finally, after repeating the imprinting for more than 100 times, the initial water contact angle of 103° for the surface of the F-DLC-coated mold was maintained.
机译：氟化类金刚石碳（F-DLC）最近已被用作纳米压印模具上的防粘层，用于半永久使用，代替了目前使用的自组装单层膜。通过化学气相沉积（CVD）在SiO_2 / Si模具上成功涂覆了F-DLC薄层。 F-DLC表面的水接触角为103°，比DLC表面高30°。此值表示F-DLC是否足以用作防粘层。此外，与DLC膜（26GPa）相似，F-DLC膜具有24GPa的高硬度。通过使用F-DLC涂层模具进行热纳米压印，成功获得了150 nm线宽和350 nm间距的AZ抗蚀剂图案。最后，在重复压印超过100次之后，对于F-DLC涂层模具的表面，初始水接触角保持为103°。

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