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首页> 外文期刊>Japanese Journal of Applied Physics. Part 2, Letters & Express Letters >Ti-Containing Amorphous Carbon Nanocomposite Coatings Prepared by Means of Eight-Target Arc-Assisted Middle Frequency Magnetron Sputtering
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Ti-Containing Amorphous Carbon Nanocomposite Coatings Prepared by Means of Eight-Target Arc-Assisted Middle Frequency Magnetron Sputtering

机译：八靶弧辅助中频磁控溅射制备含钛非晶碳纳米复合涂层

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摘要

Ti-containing amorphous carbon nanocomposite coatings were deposited by using a modified closed field twin unbalanced magnetron sputtering system which is arc assisted and consists of two circles of targets, in an Ar ambient and at a substrate temperature of 100℃ High-resolution transmission electron microscopy shows that the coatings contain Ti nanocrystals embedded in the amorphous carbon matrix. Mechanical and tribological properties of the coatings are influenced by the substrate bias voltage and Ti pair-target current. For coatings prepared at a bias of 100 V, the hardness increases from 12 GPa at a Ti-target current of 4 A to 27 GPa at 15 A. The coating at 4 A exhibits very low friction coefficient (～0.07) and excellent tribological performance with a wear rate of about 1.4 x 10~(-16) m~3 N~(-1) m~(-1).
机译：在Ar环境中和衬底温度为100℃的条件下，采用改进的闭环双不平衡磁控溅射系统沉积含Ti的非晶碳纳米复合涂层，该系统由电弧辅助并由两个目标靶组成，由两个圆靶组成。表明涂层含有嵌入无定形碳基质中的Ti纳米晶体。涂层的机械和摩擦学性能受基材偏置电压和Ti对靶电流的影响。对于在100 V偏压下制备的涂层，硬度从Ti目标电流4 A时的12 GPa增加到15 A时的27GPa。4A时的涂层具有极低的摩擦系数（〜0.07）和优异的摩擦学性能磨损率约为1.4 x 10〜（-16）m〜3 N〜（-1）m〜（-1）。

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