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首页> 外文期刊>Japanese Journal of Applied Physics. Part 1, Regular Papers, Brief Communications & Review Papers >LiNbO_3 Ultrasonic Transducers with an Inverted-Domain Layer for Radiation to Solid Media
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LiNbO_3 Ultrasonic Transducers with an Inverted-Domain Layer for Radiation to Solid Media

机译：具有倒域层的LiNbO_3超声换能器，可辐射到固体介质

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摘要

Heat treatment of lithium niobate (LiNbO_3) plates induces domain inversion, thereby yielding a ferroelectric inversion layer. In such a piezoelectric plate with an inversion layer, even-order thickness-extensional modes, as well as odd-order modes, can be excited piezoelectrically. Therefore, ultrasonic transducers using such a piezoelectric plate are expected to operate over a wide frequency range. In this paper, it is shown both theoretically and experimentally that broadband ultrasonic transducers for radiation to solid media can be obtained when the inversion layer is on the side of the acoustic load medium and the inversion layer-to-plate thickness ratio is around 0.3. A 50-110 MHz ultrasonic transducer was fabricated using 36°-rotated Y-cut LiNbO_3 plates with an inversion layer. The conversion loss characteristic was evaluated when the transducer was bonded to an acoustic medium of fused silica by a low-temperature Au diffusion bonding technique. The 3 dB specific bandwidth was as large as 74% and the minimum conversion loss was as low as 2 dB.
机译：铌酸锂（LiNbO_3）板的热处理引起畴反转，从而产生铁电反转层。在这种具有反转层的压电板中，可以压电地激发偶数阶的厚度-延伸模式以及奇数阶的模式。因此，期望使用这种压电板的超声波换能器在较宽的频率范围内工作。在本文中，无论是从理论上还是从实验上都表明，当反型层位于声负载介质的一侧且反型层与板的厚度之比约为0.3时，可以获得用于向固体介质辐射的宽带超声换能器。使用具有反转层的36°旋转Y形切割LiNbO_3板制造了50-110 MHz超声换能器。当通过低温Au扩散结合技术将换能器结合到熔融石英的声学介质上时，评估转换损耗特性。 3 dB的特定带宽高达74％，最小转换损耗低至2 dB。

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