首页> 外文期刊>Japanese Journal of Applied Physics. Part 1, Regular Papers, Brief Communications & Review Papers >Lead Zirconate Titanate Thick-Film Ultrasonic Transducer for 1 to 20 MHz Frequency Bands Fabricated by Hydrothermal Polycrystal Growth
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Lead Zirconate Titanate Thick-Film Ultrasonic Transducer for 1 to 20 MHz Frequency Bands Fabricated by Hydrothermal Polycrystal Growth

机译:锆酸钛酸铅厚膜超声传感器,用于水热多晶生长制造的1至20 MHz频带

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摘要

A thickness vibration mode ultrasonic transducer was fabricated by hydrothermal deposition of lead zirconate titanate polycrystalline thick film. This hydrothermal polycrystalline PZT thick-film (HPTF-PZT) ultrasonic transducer was studied for its wide-frequency-band transmission characteristics. The transducer had a 50-μm-thick PZT layer on a 50-μm-thick titanium substrate in an active area of 8 mm x 8 mm. The experimental results showed the HPTF-PZT ultrasonic transducer radiated a single ultrasound pulse in the frequency range from 1 to 20 MHz with a 20 dB deviation. Additionally, this transducer generated a 2 MHz sawtooth ultrasonic wave with odd-and even order-harmonic components from the 2nd to the 11th harmonics. These results indicate that the fabricated ultrasonic transducer has satisfactory wide-band characteristics for a MHz frequency range ultrasonic transmitter.
机译:通过水热沉积钛酸锆钛酸铅多晶厚膜来制造厚度振动模式超声换能器。研究了该水热多晶PZT厚膜(HPTF-PZT)超声换能器的宽带传输特性。该换能器在厚度为50μm的钛基板上,在8 mm x 8 mm的有效区域中具有厚度为50μm的PZT层。实验结果表明,HPTF-PZT超声换能器在1至20 MHz的频率范围内以20 dB的偏差辐射单个超声脉冲。此外,此换能器还产生了一个2 MHz的锯齿形超声波,具有从2次谐波到11次谐波的奇偶次谐波分量。这些结果表明,所制造的超声换能器对于MHz频率范围的超声发射器具有令人满意的宽带特性。

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