Measurements of Gas Temperature in High-Density Helicon-Wave H_2 Plasmas by Diode Laser Absorption Spectroscopy

Mitsutoshi Aramaki; Yuji Okumura; Motoshi Goto; Sadatsugu Muto; Shigeru Morita; Koichi Sasaki

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Measurements of Gas Temperature in High-Density Helicon-Wave H_2 Plasmas by Diode Laser Absorption Spectroscopy

机译：用二极管激光吸收光谱法测量高密度螺旋波H_2等离子体中的气体温度

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The gas temperatures in high-density H_2 plasmas excited by helicon-wave discharges were measured by absorption spectroscopy using a diode laser as the light source. The gas temperature was evaluated from the Doppler broadening of the absorption line profile at H_α. The gas temperature increased with rf power from 0.05 to 0.18 eV at a gas pressure of 50 m Torr. The temporal variations of the gas temperature after the initiation of discharge and the termination of the rf power were investigated. The power consumed by heating the gas was evaluated using the temperature and the time constant of the temporal variation.

机译：利用二极管激光器作为光源，通过吸收光谱法测量了由螺旋波放电激发的高密度H_2等离子体中的气体温度。通过在H_α处的吸收线分布的多普勒展宽来评估气体温度。在50 m Torr的气压下，气体温度随rf功率从0.05升高到0.18 eV。研究了放电开始和射频功率终止后气体温度的时间变化。通过使用温度和时间变化的时间常数来评估通过加热气体所消耗的功率。

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来源
《Japanese Journal of Applied Physics. Part 1, Regular Papers, Brief Communications & Review Papers》 |2005年第9a期|p.6759-6763|共5页
作者
Mitsutoshi Aramaki; Yuji Okumura; Motoshi Goto; Sadatsugu Muto; Shigeru Morita; Koichi Sasaki;
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作者单位

Department of Electrical Engineering and Computer Science, Nagoya University, Nagoya 464-8603, Japan;

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原文格式 PDF
正文语种 eng
中图分类应用物理学;
关键词
gas temperature; temporal variation; heating power; high-density H_2 plasma; diode laser; absorption spectroscopy;

机译：气体温度;时间变化;加热功率;高密度H_2等离子体;二极管激光器;吸收光谱;

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专利

1. Measurements of electron density in helicon-wave excited high-density reactive plasmas by vacuum ultraviolet emission spectroscopy [J] . Kawai Y., Kadota K., Sasaki K. Plasma Sources Science & Technology . 1998,第1期

机译：真空紫外发射光谱法测量螺旋波激发的高密度反应等离子体中的电子密度
2. Wavelength modulation absorption spectroscopy with 2f detection using multiplexed diode lasers for rapid temperature measurements in gaseous flows [J] . Liu JTC., Jeffries JB., Hanson RK. Applied physics. B, Lasers and optics . 2004,第3a4期

机译：波长调制吸收光谱法，使用多路二极管激光器进行2f检测，可快速测量气流中的温度
3. Measurements of parameters of transient gas flows by a diode laser absorption spectroscopy at elevated pressures and temperatures [J] . Bolshov M. A., Kuritsyn Yu. A., Liger V. V., Optics and Spectroscopy . 2017,第5期

机译：电压和温度下二极管激光吸收光谱法测量瞬态气体流量的测量
4. Temperature and Pressure Measurement based on Tunable Diode Laser Absorption Spectroscopy with gas absorption Linewidth Detection [C] . Yunxia Meng, Tiegen Liu, Kun Liu, Advanced sensor systems and applications VI . 2014

机译：基于可调谐二极管激光吸收光谱和气体吸收线宽检测的温度和压力测量
5. Measurements of combustion gases using tunable diode laser absorption spectroscopy. [D] . Skaggs, Reynolds Reed. 1997

机译：使用可调二极管激光吸收光谱法测量燃烧气体。
6. Determination of the Maximum Temperature in a Non-Uniform Hot Zone by Line-of-Site Absorption Spectroscopy with a Single Diode Laser [O] . Vladimir V. Liger, Vladimir R. Mironenko, Yurii A. Kuritsyn, 2018

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7. Use of diffuse reflections in tunable diode laser absorption spectroscopy:implications of laser speckle for gas absorption measurements [O] . Masiyano Dackson, Hodgkinson Jane, Tatam Ralph P. 2008

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8. Monitoring Temperature in High Enthalpy Arc-heated Plasma Flows using Tunable Diode Laser Absorption Spectroscopy. [R] . A. Nawaz D. M. Driver G. Raiche J. B. Jeffries J. S. Taunk L. S. Chang M. N. Martin R. K. Hanson 2013

机译：用可调谐二极管激光吸收光谱法监测高焓电弧加热等离子体流动的温度。

Measurements of Gas Temperature in High-Density Helicon-Wave H_2 Plasmas by Diode Laser Absorption Spectroscopy

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