Er~(3+) Photoluminescence from Er-doped Silicon-Rich Silicon Oxide Films Deposited by Laser Ablation of a Si:Er Target in an Oxygen Atmosphere

Jeong Sook HA; Young Rae JANG; Keon Ho YOO; Chang Hyun BAE; Sang Hwan NAM; Ji Seon JEON; Seung Min PARK

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Er~(3+) Photoluminescence from Er-doped Silicon-Rich Silicon Oxide Films Deposited by Laser Ablation of a Si:Er Target in an Oxygen Atmosphere

机译：氧气氛中Si：Er靶的激光烧蚀沉积的掺Er富硅氧化硅膜的Er〜（3+）光致发光

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摘要

We have developed a new pulsed laser deposition method for fabricating Er-doped silicon-rich silicon oxide (SRSO:Er) films. A target composed of a pure Si disk and an Er metal strip was ablated by a line-focused laser beam in oxygen atmosphere. The oxygen concentration that determines the relative concentrations of the three phases (Si-Si, SiO_x, and SiO_2) in the film was easily controlled by varying the ambient oxygen pressure. The photoluminescence intensity at 1.54 μm from Er~(3+) ions was strongly dependent on the amount of the Si-Si phase in the SRSO:Er films.

机译：我们已经开发出一种新的脉冲激光沉积方法，用于制造掺Er的富硅氧化硅（SRSO：Er）膜。在氧气气氛中通过线聚焦激光束烧蚀由纯Si盘和Er金属带组成的靶。通过改变环境氧气压力可以很容易地控制确定薄膜中三相（Si-Si，SiO_x和SiO_2）相对浓度的氧气浓度。 Er〜（3+）离子在1.54μm处的光致发光强度很大程度上取决于SRSO：Er膜中Si-Si相的数量。

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来源
《Japanese Journal of Applied Physics. Part 2, Letters》 |2004年第4apt1期|p.1541-1544|共4页
作者
Jeong Sook HA; Young Rae JANG; Keon Ho YOO; Chang Hyun BAE; Sang Hwan NAM; Ji Seon JEON; Seung Min PARK;
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作者单位

Department of Chemical and Biological Engineering, Korea University, Seoul 136-701, Korea;

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原文格式 PDF
正文语种 eng
中图分类应用物理学;
关键词
Er-doped silicon; pulsed laser deposition; 1.54 μm photoluminescence;

机译：掺硅;脉冲激光沉积;1.54μm光致发光;

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专利

1. The effects of ambient oxygen pressure on the 1.54 μm photoluminescence of Er-doped silicon-rich silicon oxide films grown by laser ablation of a Si + Er target [J] . J.S. HA, G.Y. SUNG, S. LEE, Applied Physics. A, Materials Science & Processing . 2004,第4a6期

机译：环境氧压对通过激光烧蚀Si + Er靶而生长的掺Er的富硅氧化硅薄膜的1.54μm光致发光的影响
2. Effects of silicon nanostructure evolution on Er~(3+) luminescence in silicon-rich silicon oxide/Er-doped silica multilayers [J] . Jee Soo Chang, Ji-Hong Jhe, Moon-Seung Yang, Applied Physics Letters . 2006,第18期

机译：硅纳米结构演变对富硅氧化硅/掺r二氧化硅多层膜中Er〜（3+）发光的影响
3. Effect of ion-irradiation induced defects on the nanocluster Si/Er~(3+) coupling in Er-doped silicon-rich silicon oxide [J] . Se-Young Seo, Hoon Jeong, Jung H. Shin, Applied Physics Letters . 2007,第2期

机译：离子辐照缺陷对掺Er富硅氧化硅中纳米团簇Si / Er〜（3+）耦合的影响
4. The Impact of the Rare-earth Precursor on the Composition, Structure and Luminescence of Er-doped Silicon-rich Silicon Oxide Films [C] . Flynn M., Zalloum O.H.Y., Wojcik J., IEEE International Conference on Group IV Photonics . 2006

机译：稀土前体对富掺杂富含富硅氧化硅膜的组成，结构和发光的影响
5. Isotopic fractionation effects under laser ablation of silicon from pure silicon and silicon oxide targets. [D] . Shappirio, Mark. 2004

机译：激光烧蚀纯硅和氧化硅靶材上的硅时，同位素分馏效应。
6. Thickness-dependent optimization of Er3+ light emission from silicon-rich silicon oxide thin films [O] . Sébastien Cueff, Christophe Labbé, Olivier Jambois, 2011

机译：富硅氧化硅薄膜中Er3 +发光的厚度依赖性优化
7. Photoluminescence of Er-doped silicon-rich oxide thin films with high Al concentrations [O] . Rozo Carlos, Fonseca Luis F., Jaque Daniel, 2011

机译：高铝浓度掺Er的富硅氧化物薄膜的光致发光

Er~(3+) Photoluminescence from Er-doped Silicon-Rich Silicon Oxide Films Deposited by Laser Ablation of a Si:Er Target in an Oxygen Atmosphere

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