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首页> 外文期刊>Japanese journal of applied physics >A high-sensitivity compact gas concentration sensor using ultraviolet light absorption with a heating function for a high-precision trimethyl aluminum gas supply system
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A high-sensitivity compact gas concentration sensor using ultraviolet light absorption with a heating function for a high-precision trimethyl aluminum gas supply system

机译:利用具有加热功能的紫外线吸收的高灵敏度紧凑型气体浓度传感器,用于高精度的三甲基铝供气系统

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摘要

This work presents a high-sensitivity, real-time, compact gas concentration sensor using a time-sharing dual-wavelength UV light absorption method developed for a high-precision trimethyl aluminum (TMA) gas supply system. We analyzed the characteristics of TMA, examined a method to increase sensitivity by controlling the gas transition, and fabricated a highly reliable heatable gas cell. The detection circuit demonstrated that TMA can be measured stably using a charge amplifier method that can detect various metal organic gases with high sensitivity. By controlling the sensing temperature to increase the ratio of TMA monomers (which have a higher UV absorbance) to dimers, a detection limit of 62.7 ppm was achieved. (C) 2019 The Japan Society of Applied Physics
机译:这项工作提出了一种高灵敏度,实时,紧凑的气体浓度传感器,该传感器采用为高精度三甲基铝(TMA)气体供应系统开发的分时双波长UV光吸收方法。我们分析了TMA的特性,研究了通过控制气体转变来提高灵敏度的方法,并制造了高度可靠的可加热气室。检测电路表明,可以使用电荷放大器方法稳定地测量TMA,该方法可以高灵敏度地检测各种金属有机气体。通过控制感测温度以增加TMA单体(具有更高的UV吸光度)与二聚体的比例,检测极限达到62.7 ppm。 (C)2019日本应用物理学会

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  • 来源
    《Japanese journal of applied physics》 |2019年第sb期|SBBL04.1-SBBL04.6|共6页
  • 作者单位

    Tohoku Univ, Grad Sch Engn, Aoba Ku, 6-6-10 Aza Aoba, Sendai, Miyagi, Japan;

    Fujikin Inc, Suminoe Ku, Osaka 5590031, Japan;

    Fujikin Inc, Suminoe Ku, Osaka 5590031, Japan;

    Tohoku Univ, Grad Sch Engn, Aoba Ku, 6-6-10 Aza Aoba, Sendai, Miyagi, Japan;

    Tohoku Univ, New Ind Creat Hatchery Ctr, Aoba Ku, 6-6-10 Aza Aoba, Sendai, Miyagi, Japan;

    Tohoku Univ, Grad Sch Engn, Aoba Ku, 6-6-10 Aza Aoba, Sendai, Miyagi, Japan;

    Tohoku Univ, Grad Sch Engn, Aoba Ku, 6-6-10 Aza Aoba, Sendai, Miyagi, Japan|Tohoku Univ, New Ind Creat Hatchery Ctr, Aoba Ku, 6-6-10 Aza Aoba, Sendai, Miyagi, Japan;

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