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首页> 外文期刊>Japanese journal of applied physics >Elastic-plastic deformation of single-crystal silicon in nano-cutting by a single-tip tool
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Elastic-plastic deformation of single-crystal silicon in nano-cutting by a single-tip tool

机译：单尖端工具在纳米切割中单晶硅的弹塑性变形

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摘要

A material removal mechanism of a single-tip tool cutting/scratch is the foundation for the analysis and prediction of the grinding process. A novel method for conducting single-tip, relatively high speed, and force-measurable nano-cutting tests with controllable cutting length are proposed to investigate the elastic-plastic deformation. Nano-cutting tests of single-crystal silicon are implemented at the cutting speeds of 0.1 m s(-1) and 1 m s(-1) which are close to the real grinding speed and much higher than that of single-tip tool scratch tests reported. Remarkable elastic recovery rate over 50% is observed in both cutting speeds. A semi-empirical model describing the relationship between the elastic recovery rate and residual depth is proposed. The normal force is studied in the whole cutting range. The findings of the elastic-plastic deformation behavior under relatively high cutting speed are valuable for the further mechanisms and process analysis of the ultra-fine grinding of brittle materials. (C) 2019 The Japan Society of Applied Physics
机译：单刀尖切削/划痕的材料去除机制是分析和预测磨削过程的基础。为了研究弹塑性变形，提出了一种新颖的方法，该方法可以进行可控的切削长度的单尖端，相对较高的速度和可测力的纳米切削试验。单晶硅的纳米切割测试以0.1 ms（-1）和1 ms（-1）的切割速度进行，这接近于实际的研磨速度，并且远高于报道的单尖端工具刮擦测试的速度。 。在两种切削速度下均观察到显着的弹性回复率超过50％。提出了描述弹性回复率与残余深度之间关系的半经验模型。在整个切削范围内研究法向力。较高切削速度下的弹塑性变形行为的发现对于脆性材料超细磨削的进一步机理和工艺分析具有重要价值。 （C）2019日本应用物理学会

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  • 来源
    《Japanese journal of applied physics》 |2019年第8期|086501.1-086501.9|共9页
  • 作者

    Huang Ning; Yan Ying; Zhou Ping; Kang Rengke; Guo Dongming;

  • 作者单位

    Dalian Univ Technol, Key Lab Precis & Nontradit Machining Technol, Minist Educ, Dalian 116024, Peoples R China;

    Dalian Univ Technol, Key Lab Precis & Nontradit Machining Technol, Minist Educ, Dalian 116024, Peoples R China;

    Dalian Univ Technol, Key Lab Precis & Nontradit Machining Technol, Minist Educ, Dalian 116024, Peoples R China;

    Dalian Univ Technol, Key Lab Precis & Nontradit Machining Technol, Minist Educ, Dalian 116024, Peoples R China;

    Dalian Univ Technol, Key Lab Precis & Nontradit Machining Technol, Minist Educ, Dalian 116024, Peoples R China;

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