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首页> 外文期刊>Japanese journal of applied physics >Geometry dependence of temperature coefficient of resonant frequency in highly sensitive resonant thermal sensors
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Geometry dependence of temperature coefficient of resonant frequency in highly sensitive resonant thermal sensors

机译：高灵敏度谐振热传感器中谐振频率温度系数的几何依赖性

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In this paper, the geometry dependence of the temperature coefficient of resonant frequency (TCRF) is investigated and compared with a theoretical thermal stress change using Si mechanical microresonators. The used resonators have Y, T, I (conventional double-supported type) and arrow shapes, and in each shape the resonant frequency change of the resonator is measured in relation to changes in the amount of heat input to the resonator. The change trend in the experimental resonant frequency and the theoretical thermal stress in changing the temperature are consist. The TCRF in each resonator is Y: -653, T: -162, I: -417, and the arrow is 174 ppm/K. These absolute values are much higher than those of conventional cantilevered Si resonators (-34.9 ppm/K). In addition, the frequency fluctuations based on Allan deviation are experimentally evaluated considering the theoretical thermal fluctuation noise. It is considered that use of this technique to improve the TCRF of resonators by changing the geometry has the possibility of creating a sensor with highly sensitive thermal detection. (C) 2017 The Japan Society of Applied Physics
机译：在本文中，研究了谐振频率温度系数（TCRF）的几何依赖性，并将其与使用Si机械微谐振器的理论热应力变化进行了比较。所使用的谐振器具有Y，T，I（常规双支撑型）和箭头形状，并且在每种形状中，相对于输入到谐振器的热量的变化来测量谐振器的谐振频率变化。包含了实验谐振频率的变化趋势和温度变化时的理论热应力。每个谐振器中的TCRF为Y：-653，T：-162，I：-417，箭头为174 ppm / K。这些绝对值比常规悬臂式硅谐振器的绝对值高（-34.9 ppm / K）。另外，基于理论上的热波动噪声，对基于Allan偏差的频率波动进行了实验评估。人们认为，使用这种技术通过改变几何形状来改善谐振器的TCRF，可能会产生具有高度灵敏的热检测的传感器。 （C）2017日本应用物理学会

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