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首页> 外文期刊>Japanese journal of applied physics >Investigation of material properties and thermal stabilities of magnetron-sputter-deposited ZnO:AI/Ag/ZnO:AI transparent conductive coatings for thin-film solar cell applications
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Investigation of material properties and thermal stabilities of magnetron-sputter-deposited ZnO:AI/Ag/ZnO:AI transparent conductive coatings for thin-film solar cell applications

机译：磁控溅射沉积薄膜太阳能电池用ZnO：AI / Ag / ZnO：AI透明导电涂层的材料性能和热稳定性的研究

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摘要

Transparent conductive oxides (TCOs) have been widely used in various optoelectronic devices. Among these TCOs, indium-tin oxide (ITO) is the most commonly used TCO material. However, owing to the scarcity of indium, there exists a strong need to replace ITO with an alternative transparent conductive coating. A TCO/metal/TCO-based multilayer structure has been considered as one promising candidate. In this work, several Al-doped ZnO (AZO) AZO/Ag/AZO samples were prepared with different Ag thicknesses. The AZO/Ag/AZO structure allows a low sheet resistance of around 10 Omega/sq and a visible transmission above 80% achieved with an overall thickness of similar to 110 nm. The optimisation of front AZO thickness helps to reduce reflection via destructive interferences. We demonstrated that the adhesion strength of the stacks can be improved by modifying top AZO deposition conditions. The adhesive tape test confirms good film adhesion (i.e., peel-off strength) to the glass substrate. The annealing studies confirm good thermal stabilities of the fabricated sandwich structure. (C) 2017 The Japan Society of Applied Physics
机译：透明导电氧化物（TCO）已广泛用于各种光电设备中。在这些TCO中，氧化铟锡（ITO）是最常用的TCO材料。然而，由于铟的稀缺，强烈需要用替代的透明导电涂层代替ITO。基于TCO /金属/ TCO的多层结构已被认为是一种很有前途的候选方案。在这项工作中，制备了几种具有不同Ag厚度的Al掺杂ZnO（AZO）AZO / Ag / AZO样品。 AZO / Ag / AZO结构可实现约10 Omega / sq的低薄层电阻，并且可见光透射率可达到80％以上，总厚度类似于110 nm。前AZO厚度的优化有助于通过相消干涉减少反射。我们证明了可以通过修改顶部AZO沉积条件来提高堆栈的粘附强度。胶带测试证实了对玻璃基材的良好膜粘附性（即，剥离强度）。退火研究证实了所制造夹层结构的良好热稳定性。 （C）2017日本应用物理学会

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