Self-Assembling Formation of Ni Nanodots on SiO_2 Induced by Remote H_2 Plasma Treatment and Their Electrical Charging Characteristics

Katsunori Makihara; Kazuhiro Shimanoe; Mitsuhisa Ikeda; Seiichiro Higashi; Seiichi Miyazaki

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Self-Assembling Formation of Ni Nanodots on SiO_2 Induced by Remote H_2 Plasma Treatment and Their Electrical Charging Characteristics

机译：远程H_2等离子体处理及其电荷特性诱导SiO_2的Ni纳米镍的自组装形成及其电力充电特性

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摘要

We fabricated nanometer-scale Ni dots and NiSi dots on an ultrathin SiO_2 layer using remote H_2 plasma and demonstrated the feasibility of remote H_2 plasma treatment for controlling the areal density of the dots. 1.8-nm-thick-Ni/SiO_2 and Ni/Si-quantum

机译：我们使用远程H_2等离子体在超薄SiO_2层上制造纳米级Ni点和NISI点，并证明了远程H_2等离子体处理的可行性，用于控制点的面部密度。 1.8-nm厚Ni / siO_2和Ni / Si-utqualum

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来源
《Japanese journal of applied physics》 |2008年第42期|3099-3102|共4页
作者
Katsunori Makihara; Kazuhiro Shimanoe; Mitsuhisa Ikeda; Seiichiro Higashi; Seiichi Miyazaki;
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正文语种 eng
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nickel nanodots; nickel silicide nanodots; remote hydrogen plasma; AFM/KFM;

机译：镍纳米蛋白;镍硅化镍纳米蛋白;远程氢等离子体;AFM / KFM.;

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1. Formation of Mn-germanide nanodots on ultrathin SiO_2 induced by remote hydrogen plasma [J] . Wen Yinghui, Makihara Katsunori, Ohta Akio, Japanese journal of applied physics . 2018,第1S期

机译：远程氢等离子体在超薄SiO_2上形成Mn-锗化物纳米点
2. Effect of hydrogen participation on the improvement in electrical characteristics of HfO_2 gate dielectrics by post-deposition remote N_2, N_2/H_2, and NH_3 plasma treatments [J] . Huang L.-T., Chang M.-L., Huang J.-J., Journal of Physics, D. Applied Physics: A Europhysics Journal . 2013,第5期

机译：氢参与对远程沉积N_2，N_2 / H_2和NH_3等离子体处理后HfO_2栅极电介质电学特性改善的影响
3. Impact of surface pre-treatment on Pt-nanodot formation induced by remote H_2-plasma exposure [J] . Fujimori Shuntaro, Makihara Katsunori, Ikeda Mitsuhisa, Japanese journal of applied physics . 2019,第期

机译：表面预处理对远程H_2 - 血浆曝光诱导Pt-Nanoot形成的影响
4. High Density Formation of Iron Nanodots on SiO_2 Induced by Remote Hydrogen Plasma [C] . Hai Zhang, Ryo Fukuoka, Yuuki Kabeya, International Conference on Advanced Engineering Materials and Technology . 2013

机译：远程氢等离子体诱导的SiO_2上的铁纳米蛋白的高密度形成
5. A study of electrical charging on large LEO spacecraft using a tethered satellite as a remote plasma reference. [D] . Aguero, Victor Manuel. 1996

机译：使用系留卫星作为远程等离子体参考的大型LEO航天器上的充电的研究。
6. Novel electrical and mechanical characteristics of composites composed of electrically conducting Ni-Cr alloy particles in non-conducting soda-lime glass [O] . Yoshiharu Waku, Teruyuki Yamashita, Hiroyuki Kitagawa, -1

机译：非导电钠钙玻璃中由导电Ni-Cr合金颗粒组成的复合材料的新型电气和机械特性
7. Characteristics of a nickel thin film and formation of nickel silicide by using remote plasma atomic layer deposition with Ni( (i) Pr-DAD)(2) [O] . ??? 2015

机译：Ni（（i）pr-DaD）远程等离子体原子层沉积镍薄膜的特性及硅化镍的形成（2）
8. Electrical Conductivity of Dense Al, Ti, Fe, Ni, Cu, Mo, Ta, and W Plasmas [R] . DeSilva, A. W., Vunni, G. B. 2011

机译：密集al，Ti，Fe，Ni，Cu，mo，Ta和W等离子体的电导率

Self-Assembling Formation of Ni Nanodots on SiO_2 Induced by Remote H_2 Plasma Treatment and Their Electrical Charging Characteristics

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