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Observational and theoretical validation of longitudinal type surface acoustic wave devices

机译:纵向型表面声波装置的观测和理论验证

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The authors have proposed longitudinal type surface acoustic wave (SAW) devices comprising a LiNbO3 thin plate, acoustic mirror, handle substrate and interdigital transducers (IDT). This paper describes the observational and theoretical validation of the proposed devices by using a laser probe system and finite element analysis (FEA). It is shown that the laser probe system based on the Sagnac interferometer is effective for direct observation of the devices operated at even 2 GHz range through the observation of SAW field distribution of the existence and lack of acoustic mirror, their comparison with FEA results and changes of the transverse mode pattern. In addition, a phenomenon of SAW radiation normal to the busbars from IDT is found both observationally and theoretically, and a possible radiation mechanism explaining the results is also discussed. (C) 2019 The Japan Society of Applied Physics
机译:作者提出了包括LINBO3薄板,声镜,手柄基板和叉指式换能器(IDT)的纵向型表面声波(SAW)器件。本文通过使用激光探头系统和有限元分析(FEA)来介绍所提出的装置的观察和理论验证。结果表明,基于SAGNAC干涉仪的激光探针系统通过观察存在和缺少声学镜的锯现场分布,对甚至2GHz的直接观察装置的直接观察,它们与FEA结果和变化的比较横向模式模式。此外,从IDT从IDT垂直于母线的SAW辐射现象是在观察和理论上发现的,并且还讨论了解释结果的可能的辐射机制。 (c)2019年日本应用物理学会

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