Analysis of trimethylgallium decomposition by high-resolution mass spectrometry

Ye Zheng; Nitta Shugo; Honda Yoshio; Pristovsek Markus; Amano Hiroshi

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Analysis of trimethylgallium decomposition by high-resolution mass spectrometry

机译：高分辨率质谱法分析三甲基镓分解

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The decomposition of trimethylgallium (Ga(CH3)(3)) was examined under H-2 and N-2 atmospheres using a high-resolution (about 0.002 u) time-of-flight mass spectrometry system, which enabled the separation of N-2 and ethene (C2H4) signals. Under H-2 atmosphere, the main decomposition product was methane (CH4) formed by the hydrogenolysis of Ga(CH3)(3). However, under N-2 atmosphere, the main product is ethane (C2H6) at temperature lower than 660 degrees C. Above 660 degrees C, the C2H6 further decomposes into CH4, acetylene (C2H2) and C2H4, and the main components in the gas phase are C2H2 and C2H4 above 1000 degrees C. Since these are effective carbon dopants, the molar ratio of H-2 to the Ga(CH3)(3) raw material in the carrier gas should be maintained above 300 to inhibit the formation of hydrocarbons in N-2. (C) 2020 The Japan Society of Applied Physics

机译：使用高分辨率（约0.002 u）飞行时间质谱系统在H-2和N-2大气下检查三甲基镓（Ga（CH3）（3））的分解，使得能够分离n- 2和乙烯（C2H4）信号。在H-2气氛下，主要分解产物是通过Ga（CH3）（3）的氢解形成的甲烷（CH 4）。但是，在N-2气氛下，主要产物在温度低于660℃的温度下是乙烷（C2H6）.C2H6进一步分解成CH4，乙炔（C2H2）和C 2 H 4，以及气体中的主要成分分解相是C2H2和C 2 H 4以上1000℃。由于这些是有效的碳掺杂剂，因此应将载气中的H-2至Ga（CH3）（3）原料的摩尔比应保持在300以上以抑制烃的形成在N-2。（c）2020日本应用物理学会

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《Japanese journal of applied physics》 |2020年第2期|025511.1-025511.5|共5页
作者
Ye Zheng; Nitta Shugo; Honda Yoshio; Pristovsek Markus; Amano Hiroshi;
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Nagoya Univ Dept Elect Engn & Comp Sci Chikusa Ku Furo Cho Nagoya Aichi 4648603 Japan;

Nagoya Univ Inst Mat & Syst Sustainabil Chikusa Ku Furo Cho Nagoya Aichi 4648603 Japan;

Nagoya Univ Inst Mat & Syst Sustainabil Chikusa Ku Furo Cho Nagoya Aichi 4648603 Japan|Nagoya Univ Inst Adv Res Chikusa Ku Furo Cho Nagoya Aichi 4648603 Japan;

Nagoya Univ Inst Mat & Syst Sustainabil Chikusa Ku Furo Cho Nagoya Aichi 4648603 Japan;

Nagoya Univ Inst Mat & Syst Sustainabil Chikusa Ku Furo Cho Nagoya Aichi 4648603 Japan|Nagoya Univ Venture Business Lab Chikusa Ku Furo Cho Nagoya Aichi 4648603 Japan|Nagoya Univ Akasaki Res Ctr Chikusa Ku Furo Cho Nagoya Aichi 4648603 Japan;

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Analysis of trimethylgallium decomposition by high-resolution mass spectrometry

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