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Study on negative ion production by electronegative gases in a helicon source

机译:Helicon源电气负电气负离子生产研究

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A helicon plasma source (HeliPS) experimental set-up is developed to perform experiments in electronegative gases. Characterization of HeliPS is done in argon and oxygen discharge by varying the working pressure, magnetic field strength as well as radio frequency power at 13.56 MHz thereby identifying the optimum parameters for its operation. After characterization, experiments have been performed in electronegative gases such as oxygen and hydrogen to understand the effect of electron affinity in producing negative ions in such plasmas. To enhance the negative ion production, both magnetic filter and magnetic cage, used innovatively in such a system, shows interesting results on their influence in electronegative plasma production. (C) 2020 The Japan Society of Applied Physics.
机译:开发了一条直升离子等离子体源(螺旋)实验设置以在电负气体中进行实验。通过在13.56MHz处改变工作压力,磁场强度,磁场强度以及射频功率,在氩气和氧气放电中进行螺旋和氧气放电的表征。从而识别其操作的最佳参数。在表征之后,已经在电负剂气体如氧气和氢气中进行了实验,以了解电子亲和力在这些等离子体中产生负离子的作用。为了增强负离子生产,在这种系统中使用创新使用的磁性滤光器和磁笼,显示出对其对电负电离等离子体生产的影响的有趣结果。 (c)2020日本应用物理学会。

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