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首页> 外文期刊>Japanese journal of applied physics >A solidly mounted, high frequency, thickness shear mode bulk acoustic wave resonator using X-LiTaO_3 thin plate and SiO_2/Ta multilayer acoustic films
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A solidly mounted, high frequency, thickness shear mode bulk acoustic wave resonator using X-LiTaO_3 thin plate and SiO_2/Ta multilayer acoustic films

机译：使用X-LIAO_3薄板和SiO_2 / TA多层声膜的稳固安装的高频，厚度剪切模式散装声波谐振器

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摘要

This paper describes a bulk acoustic wave (BAW) high-frequency resonator with a solidly mounted structure using a single crystal LiTaO3 (LT) thin plate. A Bragg reflector solidly supports the LT thin plate, which is fragile if self-suspended. The BAW resonator uses a thickness shear mode in 1.5 mu m thick X-LT. The Bragg reflector is made of four pairs of SiO2 and Ta films, i.e. eight layers in total. The fabricated device works at a resonance frequency of 1.14 GHz and an antiresonance frequency of 1.23 GHz, showing a bandwidth of 7.9% and a low-temperature coefficient of frequency of -16 ppm degrees C-1 and -26 ppm degrees C-1 at the maximum and minimum admittances, respectively. The measured impedance ratio is 61 dB, although the structure and fabrication process are not optimized yet, suggesting a high potential for this device.
机译：本文描述了具有牢固安装结构的散装声波（BAW）高频谐振器，使用单晶LiTaO3（LT）薄板。 如果自悬空，布拉格反射器坚固地支撑LT薄板，这是脆弱的。 BAW谐振器在1.5μm厚的x-lt中使用厚度剪切模式。 布拉格反射器由四对SiO 2和TA薄膜制成，即总共八层。 制造的装置以1.14GHz的共振频率和1.23GHz的反谐振频率工作，显示出7.9％的带宽和低温频率-16ppm的C-1和-26ppm度C-1 分别最大和最低入院。 测量的阻抗比为61dB，尽管尚未优化结构和制造过程，表明该装置的高潜力。

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