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首页> 外文期刊>Journal of Applied Physics >Nanopatterning of Si surfaces by normal incident ion erosion: Influence of iron incorporation on surface morphology evolution
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Nanopatterning of Si surfaces by normal incident ion erosion: Influence of iron incorporation on surface morphology evolution

机译：垂直入射离子腐蚀对硅表面进行纳米构图：铁的掺入对表面形态演变的影响

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摘要

The surface morphology of Si(100) induced by 1200 eV Ar~+ ion bombardment at normal incidence with and without Fe incorporation is presented. The formation of nanodot patterns is observed only when the stationary Fe areal density in the surface is above a threshold value of 8 x 10~(14) cm~(-2). This result is interpreted in terms of an additional surface instability due to locally nonuniform sputtering in connection with the presence of a Fe rich amorphous phase at the peak of the nanodots. At Fe concentrations below the threshold, smoothing dominates and pattern formation is inhibited. The transition from a k~(-2) to a k~(-4) behavior in the asymptotic power spectral density function supports the conclusion that under these conditions ballistic smoothing and ion-enhanced viscous flow are the two dominant mechanisms of surface relaxation.
机译：提出了在有和没有掺入Fe的情况下，由1200 eV Ar〜+离子轰击引起的Si（100）的表面形态。仅当表面的静态Fe面密度高于8 x 10〜（14）cm〜（-2）的阈值时，才能观察到纳米点图案的形成。该结果是根据由于纳米点的峰值处富铁非晶相的存在引起的局部不均匀溅射而引起的附加表面不稳定性来解释的。当Fe浓度低于阈值时，平滑作用占主导地位，并且图案形成受到抑制。渐近功率谱密度函数中从k〜（-2）到k〜（-4）行为的转变支持以下结论：在这些条件下，弹道平滑和离子增强粘性流是表面松弛的两个主要机理。

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  • 来源
    《Journal of Applied Physics》 |2011年第10期|p.822-827|共6页
  • 作者

    Jing Zhou; Stefan Facsko; Ming Lu; Wolfhard Moller;

  • 作者单位

    Institute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf,P.O. Box 510119, D-01314 Dresden, Germany,Department of Optics Science and Engineering, Fudan University, Shanghai 200433, China;

    Institute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf,P.O. Box 510119, D-01314 Dresden, Germany;

    Department of Optics Science and Engineering, Fudan University, Shanghai 200433, China;

    Institute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf,P.O. Box 510119, D-01314 Dresden, Germany;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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