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首页> 外文期刊>Journal of Applied Physics >Field-emission-assisted approach to dry micro-electro-discharge machining of carbon-nanotube forests
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Field-emission-assisted approach to dry micro-electro-discharge machining of carbon-nanotube forests

机译：场发射辅助方法对碳纳米管林进行干微放电加工

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摘要

This work investigates dry micro-electro-discharge machining (μEDM) of vertically aligned carbon nanotube (CNT) forests that are used as cathodes in the process, as opposed to conventional μEDM where the material to be machined forms the anode, toward achieving higher precision in the patterned microstructures. The new configuration with the reversed polarity is observed to generate higher discharge currents in the process, presumably due to effective field-emission from CNTs. This effect allows the process to be performed at very low discharge energies, approximately 80 × smaller than in the conventional normal-polarity case, with the machining voltage and tolerance down to 10 V and 2.5μm, respectively, enabling high-precision high-aspect-ratio micropatterning in the forests. The new approach is also demonstrated to make the process faster, cleaner, and more stable than conventional processing. Spectroscopic analyses of the forests processed by reverse μEDM show no evidence of significant crystalline deterioration or contamination in the CNTs.
机译：这项工作研究了垂直排列的碳纳米管（CNT）林的干微电火花加工（μEDM），该工艺在此过程中用作阴极，与传统的μEDM不同，传统的待加工材料形成阳极，以实现更高的精度在图案化的微结构中。观察到极性相反的新配置会在此过程中产生更高的放电电流，这大概是由于CNT的有效场发射所致。这种效果使得该工艺可以在非常低的放电能量下进行，比传统的正常极性情况小大约80倍，加工电压和公差分别降至10 V和2.5μm，从而实现了高精度的高倍率测量。森林中的比例微图案化。还证明了这种新方法可以使该过程比常规过程更快，更清洁，更稳定。反向μEDM处理的森林的光谱分析表明，没有证据表明碳纳米管中有明显的晶体变质或污染。

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  • 来源
    《Journal of Applied Physics》 |2011年第10期|p.103305.1-103305.7|共7页
  • 作者

    Tanveer Saleh; Masoud Dahmardeh; Anas Bsoul; Alireza Nojeh; Kenichi Takahata;

  • 作者单位

    Department of Electrical and Computer Engineering, University of British Columbia, Vancouver, BCV6T IZ4, Canada,FARCAMT, Industrial Engineering Department, College of Engineering, King Saud University, Riyadh 11421, Saudi Arabia;

    Department of Electrical and Computer Engineering, University of British Columbia, Vancouver, BCV6T IZ4, Canada;

    Department of Electrical and Computer Engineering, University of British Columbia, Vancouver, BCV6T IZ4, Canada,Department of Computer Engineering, Jordan University of Science and Technology, Irbid, Jordan;

    Department of Electrical and Computer Engineering, University of British Columbia, Vancouver, BCV6T IZ4, Canada;

    Department of Electrical and Computer Engineering, University of British Columbia, Vancouver, BCV6T IZ4, Canada;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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  • 正文语种 eng
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