Maskless fabrication of large scale Si nanohole array via laser annealed metal nanoparticles catalytic etching for photovoltaic application

Fei Wang; Hong Yu Yu; Xincai Wang; Junshuai Li; Xiaowei Sun; Mingfei Yang; She Mein Wong; Hongyu Zheng

首页> 外文期刊>Journal of Applied Physics >Maskless fabrication of large scale Si nanohole array via laser annealed metal nanoparticles catalytic etching for photovoltaic application

【24h】

Maskless fabrication of large scale Si nanohole array via laser annealed metal nanoparticles catalytic etching for photovoltaic application

机译：激光退火金属纳米粒子催化刻蚀在光伏应用中大规模制备无掩模硅纳米孔阵列

获取原文

获取原文并翻译 | 示例

获取外文期刊封面封底 >>

开具论文收录证明 >>

文献代查 >>

页面导航

摘要
著录项
相似文献
相关主题

摘要

In this paper, laser annealing is used to produce metal (Ag) nanoparticles as etching catalyst on a silicon surface, which enables controllable fabrication of large-scale nanohole array surface texturing without using a mask. Semispherical Ag nanoparticles with variable size and distribution are achievable by manipulating the laser annealing parameters and metal film thickness, and the underlying physics is clarified. The nanoholes array in silicon can then be realized by selective etching of silicon under Ag pattern. The optical characteristics suggest that the surface reflection can be significantly suppressed owing to the nanohole texturing, which is promising for thin film photovoltaic applications.

机译：在本文中，激光退火被用于在硅表面上生产金属（Ag）纳米粒子作为蚀刻催化剂，这使得无需使用掩膜即可进行大规模纳米孔阵列表面纹理化的可控制造。通过控制激光退火参数和金属膜厚度，可以获得具有可变尺寸和分布的半球形Ag纳米粒子，并阐明了其基本物理原理。然后可以通过在Ag图案下选择性蚀刻硅来实现硅中的纳米孔阵列。光学特性表明，由于纳米孔纹理化，可以显着抑制表面反射，这对于薄膜光伏应用很有希望。

著录项

来源
《Journal of Applied Physics》 |2010年第2期|P.024301.1-024301.3|共3页
作者
Fei Wang; Hong Yu Yu; Xincai Wang; Junshuai Li; Xiaowei Sun; Mingfei Yang; She Mein Wong; Hongyu Zheng;
展开▼
作者单位

School of Electrical and Electronic Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798;

School of Electrical and Electronic Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798;

Singapore Institute of Manufacturing Technology, Agency for Science, Technology and Research (A~*STAR), 71 Nanyang Drive, Singapore 638075;

School of Electrical and Electronic Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798;

School of Electrical and Electronic Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798;

School of Electrical and Electronic Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798;

School of Electrical and Electronic Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798;

Singapore Institute of Manufacturing Technology, Agency for Science, Technology and Research (A~*STAR), 71 Nanyang Drive, Singapore 638075;

展开▼
收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
原文格式 PDF
正文语种 eng
中图分类
关键词

相似文献

外文文献
中文文献
专利

1. Large-Area Fabrication of Periodic Arrays of Nanoholes in Metal Films and Their Application in Biosensing and Plasmonic-Enhanced Photovoltaics [J] . Jacson W. Menezes, Jacqueline Ferreira, Marcos J. L Santos, Advanced Functional Materials . 2010,第22期

机译：金属膜中纳米孔周期阵列的大面积制备及其在生物传感和等离子增强光伏中的应用
2. Fabrication of metal-shelled coaxial nanowires and annealing-induced formation of metal nanoparticles for catalytic applications: Growth and characteristics of SnO_2-branched nanostructures [J] . Hyo Sung Kim, Sang Eon Park, Hyoun Woo Kim, Solid state sciences . 2010,第6期

机译：金属壳同轴纳米线的制备和催化诱导的金属纳米粒子的退火诱导形成：SnO_2支化纳米结构的生长和特性
3. Large scale, highly dense nanoholes on metal surfaces by underwater laser assisted hydrogen etching near nanocrystalline boundary [J] . Dong Lin, Martin Yi Zhang, Chang Ye, Applied Surface Science . 2012,第10期

机译：水下激光辅助氢蚀刻在纳米晶边界附近在金属表面形成大规模，高密度的纳米孔
4. Fabrication of large-scaled synergetic silicon nanowire arrays using metal-assisted chemical etching for solar cell applications [C] . Chien-Ting Liu, Chen-Chih Hsueh, Thiyagu S., IEEE International Conference on Nanotechnology . 2013

机译：使用金属辅助化学刻蚀为太阳能电池应用制造大规模协同硅纳米线阵列
5. Fabrication of two-dimensional nanostructure array using nanosphere lithography and RIE etching and its application in optical devices. [D] . Wang, Jinsong. 2007

机译：使用纳米球面光刻和RIE刻蚀制造二维纳米结构阵列及其在光学器件中的应用。
6. Lithography-free fabrication of silicon nanowire and nanohole arrays by metal-assisted chemical etching [O] . Ruiyuan Liu, Fute Zhang, Celal Con, 2013

机译：金属辅助化学蚀刻的无光刻技术制造硅纳米线和纳米孔阵列
7. Lithography-free fabrication of silicon nanowire and nanohole arrays by metal-assisted chemical etching [O] . Ruiyuan Liu, Fute Zhang, Celal Con, 2013

机译：金属辅助化学蚀刻的无光刻技术制造硅纳米线和纳米孔阵列
8. Applications of Laser Annealing and Laser-Induced Diffusion to Photovoltaic Conversion [R] . Wood, R. F., Westbrook, R. D., Jellison, G. E. 1985

机译：激光退火和激光诱导扩散在光伏转换中的应用

Maskless fabrication of large scale Si nanohole array via laser annealed metal nanoparticles catalytic etching for photovoltaic application

摘要

著录项

相似文献

相关主题

期刊订阅