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The Relationship Between Material Properties, Device Design, And The Sensitivity Of Resonant Mechanical Sensors

机译：材料特性，设备设计与共振机械传感器的灵敏度之间的关系

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摘要

In this work we study three distinct resonant micromechanical sensor geometries and their ability to detect the addition of material at different locations on the devices. Small regions of gold were patterned on the resonators, and changes in frequency due to the presence of gold were measured as a function of position, device geometry, and the resonant mode. We have demonstrated the conditions under which micromechanical resonators are sensitive to the mechanical properties of added material as well as its mass and have quantified how these qualities have competing effects on resonant frequency using finite element analysis and analytical techniques. In cases where this competition significantly reduces frequency shift amplitudes, localized binding of the analyte is required, and we will compare different sensor designs and their frequency responses. When material is uniformly added to resonators, however, device geometry has little to no effect on sensitivity. While cantilevers may be the most commonly used geometry in this field, we show that they are not necessarily the most sensitive in all situations. In most biosensing applications, flexural rigidity is not expected to have an impact on resonant frequency, suggesting that all available resonator surface area should be used for analyte binding.
机译：在这项工作中，我们研究了三种不同的共振微机械传感器的几何形状，以及它们检测设备上不同位置的材料添加的能力。在谐振器上对金的小区域进行构图，并根据位置，器件几何形状和谐振模式对由于金的存在引起的频率变化进行测量。我们已经证明了微机械谐振器对添加材料的机械性能及其质量敏感的条件，并已使用有限元分析和分析技术量化了这些质量如何对谐振频率产生竞争性影响。如果这种竞争显着降低了频移幅度，则需要分析物的局部结合，并且我们将比较不同的传感器设计及其频率响应。但是，当将材料均匀地添加到谐振器时，器件的几何形状对灵敏度几乎没有影响。虽然悬臂梁可能是该领域中最常用的几何体，但我们证明它们不一定在所有情况下都是最敏感的。在大多数生物传感应用中，预计弯曲刚度不会影响共振频率，这表明应将所有可用的共振器表面积用于分析物结合。

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  • 来源
    《Journal of Applied Physics》 |2009年第5期|512-525|共14页
  • 作者

    Philip S. Waggoner; Harold G. Craighead;

  • 作者单位

    School of Applied Physics, Cornell University, 212 Clark Hall, Ithaca, New York 14583, USA;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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  • 正文语种 eng
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