Femtosecond Laser-induced Formation Of Nanometer-width Grooves On Synthetic Single-crystal Diamond Surfaces

Masataka Shinoda; Rafael R. Gattass; Eric Mazur

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Femtosecond Laser-induced Formation Of Nanometer-width Grooves On Synthetic Single-crystal Diamond Surfaces

机译：飞秒激光诱导在合成单晶金刚石表面形成纳米级沟槽

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We form periodic linear grooves in synthetic single-crystal diamond with femtosecond pulses at 800 nm. The grooves are 40 nm wide, 500 nm deep, up to 0.3 mm long, and have an average spacing of 146 ±7 nm. The grooves are perpendicular to the direction of the laser polarization and are formed below the threshold for ablation throughout the focal volume. The submicrometer periodicity is caused by interference between a laser-induced plasma and the incident laser beam, which locally enhances the field at the surface so the ablation threshold is exceeded. Using Raman spectroscopy we find that the structures retain the original diamond composition.

机译：我们在800 nm的飞秒脉冲中在合成单晶金刚石中形成周期性的线性凹槽。凹槽的宽度为40 nm，深度为500 nm，最大长度为0.3 mm，平均间距为146±7 nm。凹槽垂直于激光偏振方向，并且形成在整个聚焦体积内的烧蚀阈值以下。亚微米的周期性是由激光诱导的等离子体和入射激光束之间的干涉引起的，该干涉会局部增强表面处的电场，因此会超过烧蚀阈值。使用拉曼光谱法，我们发现这些结构保留了原始的金刚石成分。

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来源
《Journal of Applied Physics》 |2009年第5期|23-26|共4页
作者
Masataka Shinoda; Rafael R. Gattass; Eric Mazur;
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作者单位

School of Engineering and Applied Sciences, Harvard University, 9 Oxford Street, Cambridge, Massachusetts 02138, USA;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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正文语种 eng
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1. Raman investigation of femtosecond laser-induced graphitic columns in single-crystal diamond [J] . M. Girolami, A. Bellucci, P. Calvani, Applied Physics . 2014,第1期

机译：飞秒激光诱导单晶金刚石中石墨柱的拉曼研究
2. Raman spectroscopic study of femtosecond laser-induced phase transformation associated with ripple formation on single-crystal SiC [J] . Makoto Yamaguchi, Shigeru Ueno, Ryota Kumai, Applied Physics A: Materials Science & Processing . 2010,第1期

机译：飞秒激光诱导的相变与单晶SiC上的纹波形成相关的拉曼光谱研究
3. Raman spectroscopic study of femtosecond laser-induced phase transformation associated with ripple formation on single-crystal SiC [J] . Makoto Yamaguchi, Shigeru Ueno, Ryota Kumai, Applied Physics A: Materials Science & Processing . 2010,第1期

机译：飞秒激光诱导的相变与单晶SiC上的纹波形成相关的拉曼光谱研究
4. Formation of micro-groove on diamond by femtosecond laser micromachining [C] . Ryoji Maruyama, Takayuki Tamaki, Wataru Watanabe SPIE Micro + Nano Materials, Devices, and Applications Conference . 2019

机译：由飞秒激光微机械形成钻石上微槽的形成
5. Laser-induced thermal desorption studies of simple adsorbates on single-crystal metal and oxide surfaces [D] . Meixner, Donald Laurence 1992

机译：激光诱导的单晶金属和氧化物表面上的简单吸附物的热脱附研究
6. Femtosecond Laser-Induced Periodic Surface Structures on Different Tilted Metal Surfaces [O] . Yi-Hsien Liu, Kong-Kai Kuo, Chung-Wei Cheng 2020

机译：Femtosecond激光诱导的不同倾斜金属表面上的周期性表面结构
7. Femtosecond Laser-Induced Formation of Surface Structures on Silicon and Glassy Carbon Surfaces [O] . Abramov D.V., Galkin A.F., Gerke M.N., 2011

机译：飞秒激光诱导的硅和玻璃碳表面结构的形成

Femtosecond Laser-induced Formation Of Nanometer-width Grooves On Synthetic Single-crystal Diamond Surfaces

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