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首页> 外文期刊>Journal of Applied Physics >The role of creep in the time-dependent resistance of Ohmic gold contacts in radio frequency microelectromechanical system devices
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The role of creep in the time-dependent resistance of Ohmic gold contacts in radio frequency microelectromechanical system devices

机译：蠕变在射频微机电系统设备中欧姆金触点的时变电阻中的作用

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摘要

It is shown that measured and calculated time-dependent electrical resistances of closed gold Ohmic switches in radio frequency microelectromechanical system (rf-MEMS) devices are well described by a power law that can be derived from a single asperity creep model. The analysis reveals that the exponent and prefactor in the power law arise, respectively, from the coefficient relating creep rate to applied stress and the initial surface roughness. The analysis also shows that resistance plateaus are not, in fact, limiting resistances but rather result from the small coefficient in the power law. The model predicts that it will take a longer time for the contact resistance to attain a power law relation with each successive closing of the switch due to asperity blunting. Analysis of the first few seconds of the measured resistance for three successive openings and closings of one of the MEMS devices supports this prediction. This work thus provides guidance toward the rational design of Ohmic contacts with enhanced reliabilities by better defining variables that can be controlled through material selection, interface processing, and switch operation.
机译：结果表明，射频微机电系统（rf-MEMS）器件中的闭合金欧姆开关的测量和计算的时间相关电阻可以通过幂定律很好地描述，该幂定律可以从单个粗糙蠕变模型中得出。分析表明，幂律中的指数和前置因子分别来自与蠕变速率与施加应力和初始表面粗糙度相关的系数。分析还表明，电阻平稳实际上不是限制电阻，而是由幂律中的小系数引起的。该模型预测，由于粗糙钝化，与开关的每次连续闭合相比，接触电阻要花费更长的时间才能达到幂律关系。对其中一个MEMS器件的三个连续打开和关闭的测量电阻的前几秒钟的分析支持了这一预测。因此，这项工作通过更好地定义可以通过材料选择，界面处理和开关操作进行控制的变量，为提高可靠性的欧姆接触的合理设计提供了指导。

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