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首页> 外文期刊>Journal of Applied Physics >Electromagnetic Field Distribution Calculation In Solenoidal Inductively Coupled Plasma Using Finite Difference Method
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Electromagnetic Field Distribution Calculation In Solenoidal Inductively Coupled Plasma Using Finite Difference Method

机译：有限差分法计算电磁感应等离子体中的电磁场分布

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摘要

The electromagnetic field (both E and B fields) is calculated for a solenoidal inductively coupled plasma (ICP) discharge. The model is based on two-dimensional cylindrical coordinates, and the finite difference method is used for solving Maxwell equations in both the radial and axial directions. Through one-turn coil measurements, assuming that the electrical conductivity has a constant value in each cross section of the discharge tube, the calculated E and B fields rise sharply near the tube wall. The nonuniform radial distributions imply that the skin effect plays a significant role in the energy balance of the stable ICP. Damped distributions in the axial direction show that the magnetic flux gradually dissipates into the surrounding space. A finite difference calculation allows prediction of the electrical conductivity and plasma permeability, and the induction coil voltage and plasma current can be calculated, which are verified for correctness.
机译：计算螺线管电感耦合等离子体（ICP）放电的电磁场（E和B场）。该模型基于二维圆柱坐标，并且使用有限差分法求解径向和轴向的麦克斯韦方程组。通过单匝线圈测量，假设电导率在放电管的每个横截面中均具有恒定值，则计算出的E和B场在管壁附近急剧上升。径向分布不均匀意味着趋肤效应在稳定ICP的能量平衡中起着重要作用。轴向上的阻尼分布表明磁通逐渐散布到周围空间中。有限差分计算可以预测电导率和等离子体磁导率，并且可以计算感应线圈电压和等离子体电流，并对其进行验证以确保正确性。

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