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首页> 外文期刊>Journal of Applied Physics >Transition from tungsten erosion to carbon layer deposition with simultaneous bombardment of tungsten by helium and carbon
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Transition from tungsten erosion to carbon layer deposition with simultaneous bombardment of tungsten by helium and carbon

机译：从钨侵蚀过渡到碳层沉积，同时氦和碳同时轰击钨

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摘要

Simultaneous bombardment of tungsten layers with helium and carbon ions leads to both erosion of tungsten and implantation of carbon. The underlying processes have been investigated numerically and experimentally as a function of the carbon fraction in the incident ion flux for ion energies in the kilo electron volt range. Tungsten layers were deposited on polished single-crystal silicon substrate by magnetron sputter deposition to eliminate the influence of surface roughness on the experimental results. The fluence-dependent dynamics of the surface composition was measured in situ by ion beam analysis. The given projectile-target system is subject only to kinematic processes, and is therefore particularly suitable for benchmarking of purely kinematic simulations based on the binary-collision approximation, as implemented in the TRIDYN code. TRIDYN calculations match the experimental results very well, which demonstrates the validity of the kinematic description. In particular, the simulations allow us to predict the change of surface composition by bombardment with gaseous and nonvolatile ions, as well as the transition point from W erosion to C deposition as function of the carbon fraction in the incident ion flux.
机译：用氦和碳离子同时轰击钨层会导致钨的腐蚀和碳的注入。对于在千电子伏特范围内离子能量的入射离子通量中碳含量的函数，已对数字过程进行了数值和实验研究。通过磁控溅射沉积将钨层沉积在抛光的单晶硅基板上，以消除表面粗糙度对实验结果的影响。通过离子束分析原位测量表面组成的依赖注量的动力学。给定的弹丸目标系统仅受制于运动学过程，因此特别适用于基于二进制碰撞近似的纯运动学模拟的基准测试（在TRIDYN代码中实现）。 TRIDYN计算与实验结果非常吻合，证明了运动学描述的正确性。尤其是，这些模拟使我们能够预测由气态和非挥发性离子轰击引起的表面成分变化，以及从W腐蚀到C沉积的转变点，它是入射离子通量中碳含量的函数。

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  • 来源
    《Journal of Applied Physics》 |2007年第10期|p.104906.1-104906.6|共6页
  • 作者

    Ivan Bizyukov; Karl Krieger;

  • 作者单位

    Faculty of Physics and Technologies, Kharkiv National University, 31 Kurchatov Avenue, Kharkiv 61108, Ukraine;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 应用物理学;计量学;
  • 关键词

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