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首页> 外文期刊>Journal of Applied Physics >Characterization of hydrogenated amorphous germanium compounds obtained by x-ray chemical vapor deposition of germane: Effect of the irradiation dose on optical parameters and structural order
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Characterization of hydrogenated amorphous germanium compounds obtained by x-ray chemical vapor deposition of germane: Effect of the irradiation dose on optical parameters and structural order

机译：通过锗烷的X射线化学气相沉积获得的氢化非晶态锗化合物的表征：辐照剂量对光学参数和结构顺序的影响

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摘要

Hydrogenated nonstoichiometric germanium materials have been produced by x-ray activated-chemical vapor deposition from germane. The reactions pattern leading to the solid products has been investigated. The dose effect on the composition, the local bonding configuration, and structural characteristics of the deposited solids has been studied using infrared absorption and Raman spectroscopy and has been discussed. Optical parameters have been also determined from ultraviolet-visible spectrophotometry data. The results show that the solids are formed by a random bound network of germanium and hydrogen atoms with a-Ge zones dispersed in the matrix. The Raman results and optical parameters indicate that the structural order, both short-range and intermediate-range, decreases with increasing irradiation time. This behavior suggests that the solid is involved in the reactions leading to the final product and indicates that the formation of amorphous germanium zones is stimulated by postdeposition irradiation, which induces compositional and structural modifications.
机译：氢化的非化学计量的锗材料已通过锗烷的x射线活化化学气相沉积法制备。已经研究了导致固体产物的反应模式。使用红外吸收和拉曼光谱研究了剂量对沉积的固体成分，局部结合构型和结构特征的影响，并进行了讨论。还已经从紫外可见分光光度法数据确定了光学参数。结果表明，固体是由锗和氢原子的无规结合网络形成的，在基体中分散有a-Ge区。拉曼结果和光学参数表明，短程和中程的结构顺序随照射时间的增加而降低。此行为表明固体参与了导致最终产物的反应，并表明非晶态锗区域的形成受到沉积后辐照的刺激，这会引起成分和结构的改变。

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