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首页> 外文期刊>Journal of Applied Physics >Periodic finite element/boundary element modeling of capacitive micromachined ultrasonic transducers
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Periodic finite element/boundary element modeling of capacitive micromachined ultrasonic transducers

机译：电容式微加工超声换能器的周期有限元/边界元建模

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摘要

The possibility to excite and detect acoustic waves in fluids using capacitive transducers built on silicon using surface micromachining offers attractive opportunities in the manufacturing of high quality low cost imaging probes. As in the case of standard probe transducers, simulation codes are required to accurately design such devices. The periodic structures extensively used for these capacitive transducers has to be accounted for. In this work, a two-dimensional finite element analysis of capacitive micromachined ultrasonic transducers (cMUT) is proposed, taking into account periodicity and radiation in fluids. The convergence of the calculation is verified using different computation approaches. It is then shown that the periodic computations provide a rapid and precise analysis of the cMUT compared to non periodic calculations. The mutual displacements are deduced from the periodic harmonic calculation, providing an efficient estimation of cross-talk phenomena arising for cMUT radiating in water. The capability of cMUT operating under such conditions to generate a low velocity wave guided at the fluid/silicon interface is theoretically pointed out.
机译：使用表面微加工在硅上构建的电容式换能器激发和检测流体中的声波的可能性为制造高质量，低成本的成像探头提供了诱人的机会。与标准探头换能器一样，需要使用仿真代码来准确设计此类设备。必须考虑广泛用于这些电容式换能器的周期性结构。在这项工作中，考虑了流体的周期性和辐射，提出了电容微机械超声换能器（cMUT）的二维有限元分析。使用不同的计算方法可以验证计算的收敛性。然后表明，与非周期性计算相比，周期性计算提供了对cMUT的快速而精确的分析。从周期性谐波计算中推导出了相互位移，从而有效估算了水中cMUT辐射产生的串扰现象。理论上指出了在这样的条件下工作的cMUT产生在流体/硅界面处引导的低速波的能力。

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