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首页> 外文期刊>Journal of Applied Physics >Effect of micropillars with varying geometry and density on the efficiency of impaction-based quartz crystal microbalance aerosol sensors
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Effect of micropillars with varying geometry and density on the efficiency of impaction-based quartz crystal microbalance aerosol sensors

机译:微米与不同几何形状和密度对耐撞性石英晶微观气溶胶传感器效率的影响

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摘要

Inertial impaction is frequently used for the collection and subsequent measurement of aerosol particles in resonator-based airborne particulate matter (PM) sensors. However, particle bounce is known to significantly reduce particle collection efficiency (CE) on surfaces exhibiting low roughness, such as those present in quartz crystal microbalance (QCM) PM sensors. This paper shows that the addition of micropillars to impaction surfaces can significantly enhance their particle collection. Similarities in particle capture mechanisms between fibrous filters and pillar-enhanced surfaces are explained, and we show the adaptability of fibrous filter theory to pillared surface collection efficiency. Experiments confirm that the micropillar cross section and spacing have a significant role in particle capture. Pillars with circular, rectangular, and cross-shaped horizontal cross sections with 15μm height and 12μm (dense), 20μm (nominal), and 27μm (sparse) center-to-center spacings were printed using two-photon micro stereolithography. The efficiency increased by 35%-52% in the dense case, while the effect of the pillar shape was negligible. At nominal spacing, CE depended heavily on the pillar shape. The cross-shaped and circular pillars improved the CE by 26%-29%, although the rectangular pillars were as efficient as the bare surface. No significant difference between the bare and pillar-enhanced surfaces was visible in sparse spacing. We further show that, upon addition of a nominal distribution of micropillars to the surface of a QCM sensor for real-time mass measurements, the sensor response improved significantly (approximately 2.5 times) compared to a QCM with a bare surface.
机译:惯性剥离经常用于谐振器的空气传播颗粒物(PM)传感器中的气溶胶颗粒的收集和随后测量。然而,已知颗粒反射可显着降低表现出低粗糙度的表面上的颗粒收集效率(Ce),例如在石英晶体微稳定(QCM)PM传感器中存在的那些。本文表明,向剥离表面添加微米可以显着增强它们的颗粒收集。解释了纤维滤波器和柱子增强表面之间的颗粒捕获机制的相似性,我们展示了纤维滤波器理论对柱表面收集效率的适应性。实验证实,微小硅横截面和间距在颗粒捕获中具有重要作用。使用双光子微立体刻录印刷具有15μm高度的圆形,矩形和十字形水平横截面和12μm,20μm(标称)和27μm(稀疏)中心间距的柱。致密案例的效率增加了35%-52%,而柱状的效果可忽略不计。以标称间距,CE依赖于柱状。交叉形和圆形柱将CE提高26%-29%,尽管矩形柱子与裸露的表面有效。裸露和柱子增强表面之间没有显着差异在稀疏间距中可见。进一步表明,在向QCM传感器的QCM传感器的表面添加到QCM传感器的表面时,与具有裸露表面的QCM相比,传感器响应显着改善(约2.5倍)。

著录项

  • 来源
    《Journal of Applied Physics》 |2020年第18期|184903.1-184903.9|共9页
  • 作者单位

    Department of Physics University of Illinois at Chicago Chicago Illinois 60607 USA;

    Department of Electrical and Computer Engineering University of Illinois at Chicago Chicago Illinois 60607 USA;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
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