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首页> 外文期刊>Journal of Applied Physics >Langmuir probe measurements and mass spectrometry of plasma plumes generated by laser ablation of La0.4Ca0.6MnO3
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Langmuir probe measurements and mass spectrometry of plasma plumes generated by laser ablation of La0.4Ca0.6MnO3

机译：La 0.4 Ca 0.6 MnO 3 激光烧蚀产生的等离子体羽的Langmuir探针测量和质谱

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摘要

The plasma formed in vacuum by UV nanosecond laser ablation of La0.4Ca0.6MnO3 in the fluence range of 0.8 to 1.9 J cm−2 using both Langmuir probe analysis and energy-resolved mass spectrometry has been studied. Mass spectrometry shows that the main positive ion species are Ca+, Mn+, La+, and LaO+. The Ca+ and Mn+ energy distributions are quite broad and lie in the 0–100 eV region, with the average energies increasing with laser fluence. In contrast, the La+ and LaO+ distributions are strongly peaked around 10 eV. The net time-of-arrival signal derived from the measured positive ion energy distributions is broadly consistent with the positive ion signal measured by the Langmuir probe. We also detected a significant number of O− ions with energies in the range of 0 to 10 eV. The Langmuir probe was also used to measure the temporal variation of the electron density and temperature at 6 cm from the ablation target. In the period when O− ions are found at this position, the plasma conditions are consistent with those required for significant negative oxygen ion formation, as revealed by studies on radio frequency excited oxygen plasma.
机译：真空中通过La 0.4 Ca 0.6 MnO 3 的紫外纳秒激光烧蚀在真空中形成的等离子体，注量范围为0.8至1.9 J cm −2 。质谱表明，主要的正离子种类为Ca + ，Mn + ，La + 和LaO + 。 Ca + 和Mn + 的能量分布范围很广，位于0-100eeV范围内，平均能量随激光通量的增加而增加。相比之下，La + 和LaO + 分布在10 eV附近强烈达到峰值。从测得的阳离子能量分布得出的净到达时间信号与由Langmuir探针测得的阳离子信号大致一致。我们还检测到大量的O -离子，其能量范围为0至10 eV。 Langmuir探针还用于测量距烧蚀目标6 cm处电子密度和温度的时间变化。通过射频激发氧等离子体的研究表明，在此位置发现O -离子期间，等离子体条件与显着负氧离子形成所需的条件一致。

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