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首页> 外文期刊>Journal of Applied Physics >Square spiral photonic crystal with visible bandgap
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Square spiral photonic crystal with visible bandgap

机译：具有可见带隙的方形螺旋光子晶体

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摘要

Nanoimprint lithography was combined with glancing angle deposition (GLAD) of titanium dioxide to fabricate a square spiral columnar film with a bandgap in the visible spectral range. Nanoimprint stamps were fabricated with seed spacing ranging from 80 to 400 nm, and four periods of square spiral film were deposited on top of the 320 nm array of seeds. The ratio of lattice spacing, vertical pitch and spiral arm swing was chosen as a : P : A = 1 : 1.35 : 0.7 and the deposition angle was fixed at 86° to maximize the square spiral film’s bandgap. Reflectivity measurements show that the fabricated structure exhibit a pseudo-gap centered at around 600 nm wavelength, in good agreement with finite difference electromagnetic simulations. The absence of a full 3D bandgap is due the deviation of GLAD columns’ cross-section from the optimal one, which has to be highly elongated in the deposition plane. However, simulations show that a geometry close to the fabricated one will produce a full 3D bandgap, if the structure is inverted. The material refractive index in such an inverted photonic crystal can be as low as n = 2.15.
机译：将纳米压印光刻技术与二氧化钛的掠射角沉积（GLAD）结合，以制造在可见光谱范围内具有带隙的方形螺旋柱状薄膜。制造纳米压印模，其晶种间距为80至400 nm，并在320 nm晶种阵列的顶部沉积四个周期的方形螺旋膜。晶格间距，垂直间距和螺旋臂摆动的比率选择为：P：A = 1：1.35：0.7，并且沉积角固定为86°，以最大化方形螺旋膜的带隙。反射率测量表明，所制造的结构在600 nm波长附近具有假间隙，与有限差分电磁模拟非常吻合。没有完整的3D带隙是由于GLAD柱的横截面与最佳柱的横截面存在偏差，而最佳横截面必须在沉积平面中高度拉长。但是，仿真表明，如果结构倒置，则接近已制造的几何体将产生完整的3D带隙。在这种倒置的光子晶体中，材料的折射率可以低至n = 2.15。

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