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首页> 外文期刊>Journal of Applied Physics >Time and space resolved visible spectroscopic imaging CO2 laser produced extreme ultraviolet emitting tin plasmas
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Time and space resolved visible spectroscopic imaging CO2 laser produced extreme ultraviolet emitting tin plasmas

机译：时空分辨可见光谱成像CO2激光产生极紫外发射锡等离子体

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摘要

Experiments involving laser produced tin plasma have been carried out using a CO2 laser with an energy of 800 mJ/pulse and a full width at half maximum (FWHM) of 80 ns in vacuum. Time-integrated extreme ultraviolet spectral measurement showed that the peak of the extreme ultraviolet lithography spectrum was located at 13.5 nm and the spectrum profile’s FWHM of the unresolved transition arrays was 1.1 nm. Plasma parameters of the electron temperature and density measurements in both axial and radial directions at later times had been obtained from a two-dimensional time and space resolved image spectra analysis. The axial spatial distribution of the electron density showed a 1/d2.6 decrease profile, and the radial spatial distribution of the electron density showed a 1/r1.1 profile, in which d is the axial distance from the target surface and r is the radial distance. The electron density was found to maintain symmetry across the radial distance at all delay times. Near the plasma plume center, the electron temperature Te varied slightly with increasing axial or radial distance, which was related to collisional decoupling and reheating of the ionized species in the plasma at distances longer than 3 to 4 mm. The space averaged electron temperature was measured in the range of 3.4–1.0 eV, and the space averaged electron density was measured in the range of 2.0 × 1017 to 2.2 × 1016 cm-3, as the time delay varied from 1.6 μs to 3.6 μs with respect to the pulse discharge. Time evolutions of the plasma temperature and density were found to have an apparent rise at a delay time of 2.4 μs in the corresponding time of the laser pulse tail peak. This suggests that plasma parameters and extreme ultraviolet emission intensity can be controlled by a double pulse combined laser.
机译：已经使用CO2激光器进行了涉及激光产生的锡等离子体的实验，该激光器在真空中的能量为800 mJ /脉冲，半峰全宽（FWHM）为80 ns。时间积分的极端紫外光谱测量表明，极端紫外光刻光谱的峰值位于13.5 nm，未分辨过渡阵列的光谱轮廓的FWHM为1.1 nm。从二维时间和空间分辨图像光谱分析获得了稍后沿轴向和径向的电子温度和密度测量的等离子体参数。电子密度的轴向空间分布呈现出1 / d 2.6 减小的轮廓，而电子密度的径向空间分布呈现出1 / r 1.1 的轮廓，其中d是距目标表面的轴向距离，r是径向距离。发现在所有延迟时间，电子密度在整个径向距离上保持对称。在等离子体羽流中心附近，电子温度Te随着轴向或径向距离的增加而略有变化，这与等离子体中电离物质的碰撞解耦和重新加热之间的距离长于3-4 mm有关。空间平均电子温度的测量范围为3.4–1.0 eV，空间平均电子密度的测量范围为2.0×10 17 至2.2×10 16 cm -3 ，因为相对于脉冲放电，时间延迟从1.6μs到3.6μs不等。发现在激光脉冲尾峰的相应时间中，等离子体温度和密度的时间演化在2.4μs的延迟时间内明显升高。这表明可以通过双脉冲组合激光器控制等离子体参数和极紫外发射强度。

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  • 来源
    《Journal of Applied Physics》 |2012年第6期|p.1-7|共7页
  • 作者

    Wu Tao; Wang Xinbing; Wang Shaoyi; Tang Jian; Lu Peixiang; Lu Hong;

  • 作者单位

    Wuhan National Laboratory for Optoelectronics, College of Optoelectronic Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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