Deposition of thin films by beam induced polymerization of divinyl benzene

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Deposition of thin films by beam induced polymerization of divinyl benzene

机译：束诱导的二乙烯基苯聚合沉积薄膜

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Approaches to the mathematical description of thin film deposition from the gas phase by beam induced polymerization are discussed and compared to experimental results. As an example, deposition from divinyl benzene has been studied using electron as well as ion beams. A suitable combination of experiments under continuous and pulsed irradiation was found to enable the determination of reaction cross sections and time constants. For divinyl benzene the cross section for the activation of polymerization by electrons was found to be 2×10-14 cm2. The lifetime of the active centers was found to be about half a second. The charge necessary to deposit a 100‐nm layer can be lower than 0.15 C/cm2. Ion beam induced polymerization proceeds with much higher efficiency, promising some prospects for its application in microlithography.

机译：讨论了通过束诱导聚合从气相沉积薄膜的数学方法，并与实验结果进行了比较。例如，已经使用电子束和离子束研究了从二乙烯基苯的沉积。发现在连续和脉冲辐射下的实验的适当组合能够确定反应截面和时间常数。对于二乙烯基苯，发现通过电子活化聚合反应的横截面为2×10-14 cm2。发现活动中心的寿命约为半秒。沉积100 nm层所需的电荷可以低于0.15 C / cm2。离子束诱导聚合的效率要高得多，这有望将其应用于微光刻。

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《Journal of Applied Physics》 |1982年第12期|P.9053-9057|共5页
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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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1. Growth Rate and Cross-Linking Kinetics of Poly(divinyl benzene) Thin Films Formed via Initiated Chemical Vapor Deposition [J] . Moni Priya, Mohr Alan C., Gleason Karen K. Langmuir: The ACS Journal of Surfaces and Colloids . 2018,第23期

机译：通过引发的化学气相沉积形成的聚（二乙烯基苯）薄膜的生长速率和交联动力学
2. Environmentally stable organic thin-films transistors: Terminal styryl vs central divinyl benzene building blocks for p-type oligothiophene semiconductors [J] . Videlot-Ackermann C, Ackermann J, Kawamura K, Organic Electronics . 2006,第6期

机译：环境稳定的有机薄膜晶体管：用于p型低聚噻吩半导体的苯乙烯基与中心二乙烯基苯的构建基块
3. Variations in cross-link density with deposition pressure in ultrathin plasma polymerized benzene and octafluorocyclobutane films [J] . Peri S.R., Habersberger B., Akgun B., Polymer: The International Journal for the Science and Technology of Polymers . 2010,第19期

机译：超薄等离子体聚合苯和八氟环丁烷薄膜中交联密度随沉积压力的变化
4. Deposition of Thin Films of Benzene or Naphthalene by Plasma Polymerization and Application to Organic Light Emitting Devices [C] . Yoshihiro Takahashi, Hironori Kanai, Yuki Sato, International display workshops . 2012

机译：等离子体聚合沉积苯或萘薄膜及其在有机发光器件中的应用
5. Fluorocarbon thin-film deposition on polymer surfaces from low-energy polyatomic ion beams. [D] . Wijesundara, Muthu Bandage Jayathilaka. 2001

机译：低能多原子离子束在聚合物表面沉积碳氟化合物薄膜。
6. Deposition of Stainless Steel Thin Films: An Electron Beam Physical Vapour Deposition Approach [O] . Naser Ali, Joao A. Teixeira, Abdulmajid Addali, 2019

机译：不锈钢薄膜的沉积：电子束物理气相沉积方法
7. Structural Characterization of Thin Epitaxial GaN Films on Polymer Polyimides Substrates by Ion Beam Assisted Deposition [O] . Sri Vidawati, Jürgen W. Gerlach, Benjamin Herold, 2020

机译：离子束辅助沉积聚合物聚酰亚胺基材薄外延GaN薄膜的结构表征
8. Ion beams as a means of deposition and in-situ characterization of thin films and thin film layered structures [R] . Krauss, A R, Rangaswamy, M, Gruen, D M, 1992

机译：离子束作为沉积和原位表征薄膜和薄膜分层结构的手段

Deposition of thin films by beam induced polymerization of divinyl benzene

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