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首页> 外文期刊>Journal of Applied Physics >Effects of high‐intensity electron bombardment on the secondary‐emission characteristics of a MgO/Au‐cermet film
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Effects of high‐intensity electron bombardment on the secondary‐emission characteristics of a MgO/Au‐cermet film

机译：高强度电子轰击对MgO / Au金属陶瓷薄膜二次发射特性的影响

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An experiment to determine the durability of a 75 MgO/25 Au‐cermet film secondary‐emission cathode has been carried out over a period of 4000 h. A 2‐keV electron beam of 2 A/cm2 current density was applied to a single spot and the secondary‐electron‐yield curve was monitored at regular intervals. To determine changes in chemical composition, Auger analysis was carried out with the same electron beam. Results of these tests indicated a decrease in maximum yield from 8.4 to 3.7 and a corresponding increase in the first crossover energy of 16 to 25 eV. Inspection of the relative intensities of the Auger spectral lines revealed that both Au and Mg increased relative to 0, with the Au line showing a steady increase during the first 500 h and then leveling off after 1500 h for the remainder of the testing period. The discovery of an apparent Au deficiency in the outer layers of the film is in accord with the initially high yield and the expected differential sputtering effects during argon sputter etching prior to the experiment. A surface profilometer measurement indicated that a crater of approximately 500 Å in depth was etched during the bombardment.
机译：在4000小时内进行了确定75 MgO / 25 Au-金属陶瓷膜二次发射阴极的耐久性的实验。将一个2ke / cm2电流密度的2keV电子束施加到一个点上，并以固定间隔监视二次电子产率曲线。为了确定化学组成的变化，使用相同的电子束进行俄歇分析。这些测试的结果表明最大产率从8.4降低到3.7，并且第一次穿越能量相应增加了16到25 eV。对俄歇谱线的相对强度的检查表明，Au和Mg均相对于0有所增加，Au线在前500小时内显示出稳定的增加，然后在其余测试期间在1500 h后趋于平稳。在膜的外层中发现明显的金缺乏是与最初的高产率和在实验之前的氩溅射蚀刻期间预期的不同的溅射效果一致的。表面轮廓仪的测量表明，轰击过程中蚀刻了深度约为500Å的凹坑。

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    《Journal of Applied Physics》 |1977年第7期|P.3028-3031|共4页
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  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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