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首页> 外文期刊>Journal of Crystal Growth >From conformal overgrowth to lateral growth of indium arsenide nano structures on silicon substrates by MOVPE
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From conformal overgrowth to lateral growth of indium arsenide nano structures on silicon substrates by MOVPE

机译:从共形过度生长到MOVPE在硅衬底上横向生长砷化铟纳米结构

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摘要

A methodology for the deposition of lateral InAs nanostructures on silicon by selective area metal organic vapor phase epitaxy (SA-MOVPE) is presented. Growth parameters which are optimal for the SA-MOVPE of conformal InAs overgrowth on GaAs nanowires were transferred to the lateral SA growth of InAs structures on patterned silicon substrates. The substrate pretreatment conditions and growth parameters were further optimized with respect to selectivity and nanostructure morphology. It is found that lateral growth of InAs nano structures can be achieved on patterned Si(110) as well as on patterned silicon on insulator (SOI) substrates. An investigation of the laterally grown InAs/Si nanowires' crystal structure revealed a faceted but nevertheless abrupt Si-InAs interface on the Si(110) substrate as well as relaxation and a high crystallinity of the deposited InAs on both Si template types. The morphology and crystallinity of laterally grown structures are discussed in detail and compared to that of vertical shell/core InAs/CaAs nanowires.
机译:提出了通过选择性区域金属有机气相外延(SA-MOVPE)在硅上沉积横向InAs纳米结构的方法。 GaAs纳米线上共形InAs过度生长的SA-MOVPE的最佳生长参数已转移到图案化硅衬底上InAs结构的横向SA生长。关于选择性和纳米结构形态,进一步优化了底物预处理条件和生长参数。发现在图案化的Si(110)以及绝缘体上的图案化硅(SOI)衬底上可以实现InAs纳米结构的横向生长。对横向生长的InAs / Si纳米线晶体结构的研究表明,Si(110)衬底上的Si-InAs界面多面但突变,而且两种Si模板类型上沉积的InAs的弛豫和高结晶度。详细讨论了横向生长结构的形态和结晶度,并将其与垂直壳/芯InAs / CaAs纳米线的形态和结晶度进行了比较。

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