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Investigation of dislocation structures in ribbon- and ingot-grown multicrystalline silicon

机译:带状和晶锭生长的多晶硅中的位错结构研究

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摘要

In this paper, an experimental study of dislocation structures in multicrystalline silicon is presented. The alignment of dislocations in samples from both edge-defined film-fed growth and ingot crystallization by vertical Bridgman growth is investigated. Crystallographic orientations of single grains and dislocation structures are analyzed by electron backscatter diffraction and infrared microscopy.{111} and {211} planes are identified to be the typical crystallographic planes, where dislocations are arranged. It is concluded that {111} and {211} planes are involved in plastic deformation and recovery processes during growth, respectively. In ribbon-grown samples, the dislocations are mainly arranged on {111} slip planes, whereas an arrangement on {211} planes prevails in ingot-grown samples. The influence of the growth and cooling conditions on the final alignment of dislocations in mc-Si is discussed and a possible explanation for a different annealing behaviour of ribbon- and ingot-grown crystals is given.
机译:本文介绍了多晶硅中位错结构的实验研究。研究了边缘限定的薄膜喂养生长和垂直布里奇曼生长的晶锭结晶中的位错排列。通过电子背散射衍射和红外显微镜分析了单晶和位错结构的晶体取向。{111}和{211}面被确定为典型的晶体平面,位错被排列在其中。结论是{111}和{211}面分别参与了生长过程中的塑性变形和恢复过程。在带状生长的样品中,位错主要排列在{111}滑移面上,而在晶锭生长的样品中则以{211}平面排列为主。讨论了生长和冷却条件对mc-Si中位错最终对准的影响,并给出了带状和锭状晶体不同退火行为的可能解释。

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  • 来源
    《Journal of Crystal Growth》 |2013年第1期|41-46|共6页
  • 作者单位

    Institute of Nonferrous Metallurgy and Purest Materials, TU Bergakademie Freiberg, Leipziger Str. 34, 09599 Freiberg, Germany;

    Institute of Experimental Physics, TU Bergakademie Freiberg, Leipziger Str. 23, 09599 Freiberg, Germany;

    Institute of Experimental Physics, TU Bergakademie Freiberg, Leipziger Str. 23, 09599 Freiberg, Germany;

    Institute of Nonferrous Metallurgy and Purest Materials, TU Bergakademie Freiberg, Leipziger Str. 34, 09599 Freiberg, Germany;

    Institute of Ceramic, Glass and Construction Materials, TU Bergakademie Freiberg, Agricolastr. 17, 09599 Freiberg, Germany;

    Institute of Nonferrous Metallurgy and Purest Materials, TU Bergakademie Freiberg, Leipziger Str. 34, 09599 Freiberg, Germany;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Crystal structure; Defects; Growth from melt; Bridgman technique; Edge defined film fed growth; Semiconducting silicon;

    机译:晶体结构缺陷;从熔体中生长;布里奇曼技术;边缘确定的薄膜进食生长;半导体硅;

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