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首页> 外文期刊>Journal of Crystal Growth >Study on the in-line sputtering growth and structural properties of polycrystalline ZnO:Al on ZnO and glass
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Study on the in-line sputtering growth and structural properties of polycrystalline ZnO:Al on ZnO and glass

机译：ZnO和玻璃上多晶ZnO：Al在线溅射生长及结构性能的研究

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摘要

This work endeavors to develop a better understanding of the growth of aluminum doped zinc oxide (ZnO:Al) films under relevant sputtering conditions that after etching yield good light trapping structures for use in thin-film silicon solar cells. The growth and etching characteristics of films grown on various substrates, including texture etched ZnO:Al, ZnO single crystals, and glass, are examined. ZnO:Al is shown to grow quasi-epitaxially on the textured ZnO:Al surface. While the new ZnO:Al growth maintains topographical features, similar roughness, and c-axis orientation, the sites of craters formed during etching are altered. The inclusion of a buffer layer between the textured ZnO:Al and the new ZnO:Al is shown to reset the c-axis. Growth and etching characteristics of ZnO:Al films on glass indicate that the columnar c-axis oriented grains are primarily Zn-terminated. A ZnO:Al growth model is proposed to explain the observed differences between the various substrates.
机译：这项工作致力于更好地理解在溅射条件下掺杂铝的氧化锌（ZnO：Al）膜的生长，该溅射条件在蚀刻后产生了用于薄膜硅太阳能电池的良好的光捕获结构。检查了在各种基板上生长的膜的生长和蚀刻特性，包括纹理蚀刻的ZnO：Al，ZnO单晶和玻璃。 ZnO：Al在纹理化的ZnO：Al表面上显示为准外延生长。尽管新的ZnO：Al生长保持了形貌特征，相似的粗糙度和c轴方向，但蚀刻过程中形成的凹坑的位置却发生了变化。显示在织构的ZnO：Al和新的ZnO：Al之间包含缓冲层可重置c轴。玻璃上ZnO：Al膜的生长和蚀刻特性表明，柱状c轴取向晶粒主要是Zn端基。提出了ZnO：Al生长模型来解释在各种衬底之间观察到的差异。

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  • 来源
    《Journal of Crystal Growth》 |2012年第1期|p.12-18|共7页
  • 作者

    Jorj I. Owen; Wendi Zhang; Dominik Koehl; Juergen Huepkes;

  • 作者单位

    IEK5-Photovoltaik, Forschungszentrum Juelich GmbH, 52425 Jiilich, Germany;

    IEK5-Photovoltaik, Forschungszentrum Juelich GmbH, 52425 Jiilich, Germany;

    Institute of Physics, RWTH Aachen University, Sommerfeldstrasse 14, 52074 Aachen, Germany;

    IEK5-Photovoltaik, Forschungszentrum Juelich GmbH, 52425 Jiilich, Germany;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    A1. etching; A1. growth models; A3. sputtering; B2. ZnO; B3. solar cells;

    机译：A1。蚀刻A1。增长模型;A3。溅射B2。氧化锌;B3。太阳能电池;

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