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首页> 外文期刊>Journal of Crystal Growth >In situ reflectance monitoring for the MOVPE of strain-balanced InGaAs/GaAsP quantum-wells
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In situ reflectance monitoring for the MOVPE of strain-balanced InGaAs/GaAsP quantum-wells

机译:应变平衡InGaAs / GaAsP量子阱MOVPE的原位反射监测

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摘要

A strain-balanced InGaAs/GaAsP multiple quantum-wells (MQWs) structure was grown by metal organic vapor phase epitaxy (MOVPE) on GaAs substrate, aiming at a middle cell that improves current matching in a tandem solar cell. In order to detect the instant of strain relaxation in the course of MOVPE, which deteriorates crystal quality significantly, we employed in situ optical surface reflectivity measurement. When strain balancing was incomplete, surface reflectivity dropped during the growth of MQWs, indicating lattice relaxation. Such drop in surface reflectivity occurred at a smaller number of stacked quantum wells when the absolute value of an average strain per well/barrier pair was larger. The accumulated strain, i.e., the product between the average strain and the total thickness at the moment of reflectivity dropped, was roughly constant for all the MQWs, indicating a possibility that we can use this value as the measure to predict the maximum number of MQWs for a given value of the average strain. The reflectance anisotropy (RA) was also monitored in the course of the growth. The value of RA showed linear periodic behavior before the lattice relaxation, corresponding to the well/ barrier stacks, suggesting that anisotropy of surface atoms reflects accumulated strain of the growth surface.
机译:通过金属有机气相外延(MOVPE)在GaAs衬底上生长应变平衡的InGaAs / GaAsP多量子阱(MQWs)结构,旨在改善串联太阳能电池中电流匹配的中间电池。为了检测MOVPE过程中应变松弛的瞬间,这会显着降低晶体质量,我们采用了原位光学表面反射率测量。当应变平衡不完全时,在MQW的生长过程中表面反射率下降,表明晶格弛豫。当每个阱/势垒对的平均应变的绝对值较大时,这种表面反射率的下降发生在较少数量的堆叠量子阱上。对于所有MQW,累积应变(即,平均应变与反射率下降时的总厚度之间的乘积)对于所有MQW都是大致恒定的,这表明我们可以使用该值作为预测MQW的最大数量的度量给定的平均应变值。在生长过程中还监测了反射率各向异性(RA)。 RA值显示出晶格弛豫之前的线性周期性行为,对应于阱/势垒堆叠,表明表面原子的各向异性反映了生长表面的累积应变。

著录项

  • 来源
    《Journal of Crystal Growth》 |2010年第8期|p.1364-1369|共6页
  • 作者单位

    Research Center for Advanced Science and Technology, The University of Tokyo, Tokyo, Japan;

    rnDepartment of Electrical Engineering and Information Systems, School of Engineering, The University of Tokyo, Tokyo, Japan;

    rnDepartment of Electrical Engineering and Information Systems, School of Engineering, The University of Tokyo, Tokyo, Japan;

    rnResearch Center for Advanced Science and Technology, The University of Tokyo, Tokyo, Japan;

    rnDepartment of Electrical Engineering and Information Systems, School of Engineering, The University of Tokyo, Tokyo, Japan Institute of Engineering innovation, School of Engineering, The University of Tokyo, Tokyo, Japan;

    rnResearch Center for Advanced Science and Technology, The University of Tokyo, Tokyo, Japan;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    A1. Surface structure; A3. Metalorganic vapor phase epitaxy; B1. Gallium arsenic; B2. Semiconducting III-V materials;

    机译:A1。表面结构;A3。金属有机气相外延;B1。砷化镓;B2。半导体III-V材料;

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