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首页> 外文期刊>Journal of Crystal Growth >Prediction of the three-phase boundary movement in Czochralski crystal growth
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Prediction of the three-phase boundary movement in Czochralski crystal growth

机译:直拉晶体生长中三相边界运动的预测

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摘要

A numerical algorithm is presented which allows three-dimensional time-dependent simulations of Czochralski and other crystal growth processes. Besides the computation of turbulent flow and heat transfer in the melt, it includes the movement of the crystallization interface between melt and crystal, the dynamics of the melt free surface with the meniscus and the variation of the three-phase boundary. Thus, there is the potential that crystal diameter variations, which occur during growth of the start and the end cone can be predicted. This is illustrated by results of sample computations.
机译:提出了一种数值算法,该算法允许对Czochralski和其他晶体生长过程进行三维时变仿真。除了计算熔体中的湍流和传热之外,它还包括熔体和晶体之间的结晶界面的运动,具有弯液面的无熔体表面的动力学以及三相边界的变化。因此,存在可以预测在起始锥和终止锥的生长期间发生的晶体直径变化的可能性。样本计算的结果说明了这一点。

著录项

  • 来源
    《Journal of Crystal Growth》 |2010年第17期|P.2297-2299|共3页
  • 作者单位

    Faculty of Process Engineering (VT), Georg Simon Ohm University of Applied Sciences Nuremberg, Wassertorstrasse 10, D-90489 Nuremberg, Germany;

    rnDepartment of Fluid Mechanics (PfS), Helmut Schmidt University Hamburg, Holstenhofweg 85, D-22043 Hamburg, Germany;

    rnFaculty of Process Engineering (VT), Georg Simon Ohm University of Applied Sciences Nuremberg, Wassertorstrasse 10, D-90489 Nuremberg, Germany;

    rnInstitute of Fluid Mechanics (LSTM), Friedrich Alexander University Erlangen-Nuremberg, Cauerstrasse 4, D-91058 Erlangen, Germany;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    A1. Computer simulation; A1. Interfaces; A2. Czochralski method; B2. Semiconducting silicon;

    机译:A1。计算机仿真;A1。接口;A2。直拉法;B2。半导体硅;

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