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首页> 外文期刊>Journal of Crystal Growth >Phase separation phenomenon in MOCVD-grown GaInP epitaxial layers
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Phase separation phenomenon in MOCVD-grown GaInP epitaxial layers

机译:MOCVD生长的GaInP外延层中的相分离现象

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摘要

In-rich and Ga-rich GalnP films were intentionally grown on (001) GaAs substrates by low-pressure MOCVD to investigate the effect of lattice strain on composition. High-resolution X-ray diffraction (HRXRD) measurement showed that a GalnP single layer exhibits a double-diffracted peak phenomenon. Such a double peak represents a composition separation in the grown film, resulting in two absorption cutoff energies in optical absorption analysis. Cross-sectional transmission electron microscopic (TEM) observation confirmed the composition separation in an In-rich GalnP film. Furthermore, the composition separation amount of a Ga-rich GalnP film after substrate removal was found to be ~0.5%, which reflects the actual effect of lattice strain on composition during growth stage.
机译:通过低压MOCVD在(001)GaAs衬底上有意生长富In和富Ga的GalnP膜,以研究晶格应变对成分的影响。高分辨率X射线衍射(HRXRD)测量表明,GalnP单层显示出双衍射峰现象。这样的双峰表示生长的膜中的成分分离,从而在光吸收分析中产生两个吸收截止能量。截面透射电子显微镜(TEM)观察证实了富In的GalnP膜中的成分分离。此外,发现去除衬底之后的富含Ga的GalnP膜的成分分离量为〜0.5%,这反映出晶格应变对生长阶段中成分的实际影响。

著录项

  • 来源
    《Journal of Crystal Growth》 |2009年第11期|3220-3224|共5页
  • 作者单位

    Institute of Precision Engineering, National Chung Hsing University, Taichung 402, Taiwan, R.O.C;

    Institute of Precision Engineering, National Chung Hsing University, Taichung 402, Taiwan, R.O.C;

    Institute of Electro-Optical and Materials Science, National Formosa University, Yunlin 632, Taiwan, R.O.C;

    Institute of Precision Engineering, National Chung Hsing University, Taichung 402, Taiwan, R.O.C;

    Institute of Precision Engineering, National Chung Hsing University, Taichung 402, Taiwan, R.O.C;

    Department of Materials Engineering, National Chung Hsing University, Taichung 402, Taiwan, R.O.C;

    Department of Electronic Engineering, National Changhua University of Education, Changhua 500, Taiwan, R.O.C;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    A1. Stresses; A1. S-ray diffraction; A3. Metalorganic chemical vapor deposition; B1. GainP;

    机译:A1。压力;A1。 S射线衍射;A3。金属有机化学气相沉积;B1。增益;

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