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Multi-analytical study of syntactic coalescence of polytypes in a 6H-SiC sample

机译:6H-SiC样本中多型的句法合并的多分析研究

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X-ray diffraction topography (XRDT), using both synchrotron white-beam (SWBXT) and conventional MoKα_1, radiation, μ-Raman spectroscopy and transmission electron microscopy (TEM) were used to study a complex syntactic coalescence of polytypes in a PVT-grown 6H-SiC sample. The combined use of these techniques has proven to be well suited to determine twin-related lamellae of polytype 15R. Each single technique used here was not fully adequate to establish the polytypic nature and the geometric relationship between the lamellae of foreign polytypes and the surrounding crystal bulk. X-ray diffraction topographies showing the whole slice, enabled the location of three lamellae: one lamella, labelled L_1, and two micro-lamellae L_2 and L_3. Lamella L_3 was enclosed in L_1. The diffraction contrast analyses and the μ-Raman spectra indicated that the L_1 and L_2 lamellae were exactly iso-oriented and both consisted of the 15R polytype, whereas the polytype of the L_3 lamella could not be clearly determined. Transmission electron microscopy (TEM) enabled a more thorough investigation of the actual polytype of this lamella. TEM analyses were carried out on a small fragment embedding the L_3 lamella and these indicated that L_3 was a 15R polytype which was twin-related by a rotation of 180 about the [0001] axis with a (0001) compositional plane.
机译:使用同步加速器白光束(SWBXT)和常规MoKα_1的X射线衍射形貌(XRDT),通过辐射,μ拉曼光谱和透射电子显微镜(TEM)来研究PVT生长的多型体的复杂句法合并6H-SiC样品。已证明这些技术的组合使用非常适合确定多型15R的双胞胎相关薄片。这里使用的每种技术都不足以建立多型性以及外来多型体的薄片与周围晶体块之间的几何关系。 X射线衍射地形图显示了整个切片,可以定位三个薄片:一个薄片标记为L_1,两个微型薄片L_2和L_3。 Lamella L_3包含在L_1中。衍射对比分析和μ-拉曼光谱表明,L_1和L_2薄片是完全同向的,并且都由15R多型组成,而L_3薄片的多型无法清楚地确定。透射电子显微镜(TEM)可以更彻底地研究这种薄片的实际多型性。 TEM分析是在嵌入L_3薄片的小片段上进行的,这些分析表明L_3是15R多型,通过围绕[0001]轴和(0001)组成平面旋转180度而成双相关。

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