In situ monitoring of periodic structures during MOVPE of Ill-nitrides

C. Simbrunner; A. Kharchenko; A. Navarro-Quezada; M. Wegscheider; M. Quast; Tian Li; A. Bonanni; J. Bethke; K. Lischka; H. Sitter

首页> 外文期刊>Journal of Crystal Growth >In situ monitoring of periodic structures during MOVPE of Ill-nitrides

【24h】

In situ monitoring of periodic structures during MOVPE of Ill-nitrides

机译：氮化物MOVPE过程中的周期性结构的原位监测

获取原文

获取原文并翻译 | 示例

掌桥外文数据库（机构版） >>

开具论文收录证明 >>

文献代查 >>

页面导航

摘要
著录项
相似文献
相关主题

摘要

During the last years epitaxially grown periodic structures have attracted increasing interest in many fields of physics and device applications. As a consequence, the growth procedures tend towards complexity and an enhanced number of parameters has to b

机译：在最近几年中，外延生长的周期性结构在物理和器件应用的许多领域中引起了越来越多的兴趣。结果，增长过程趋于复杂，必须增加参数数量。

著录项

来源
《Journal of Crystal Growth》 |2008年第9期|p.1607-1613|共7页
作者
C. Simbrunner; A. Kharchenko; A. Navarro-Quezada; M. Wegscheider; M. Quast; Tian Li; A. Bonanni; J. Bethke; K. Lischka; H. Sitter;
展开▼
作者单位

Institute of Semiconductor and Solid State Physics, University Linz, Austria;

展开▼
收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
原文格式 PDF
正文语种 eng
中图分类晶体学;
关键词
A1. In situ characterization; A1. laser refiectometry; A1. periodic structures; A1. X-ray diffraction; B1. MOCVD; B3. nitride semiconductors;

机译：A1。原位表征;A1。激光反射光度法;A1。周期性结构;A1。 X射线衍射;B1。 MOCVD;B3。氮化物半导体;

相似文献

外文文献
中文文献
专利

1. The influence of In composition on properties of In_xGa_(1-x)As/ GaAs structures grown by MOVPE and in situ monitored by spectral reflectance [J] . M. Bedoui, M.M. Habchi, I. Moussa, Superlattices and microstructures . 2017,第JANa期

机译：In组成对MOVPE生长并通过光谱反射率原位监测的In_xGa_（1-x）As / GaAs结构性质的影响
2. In situ reflectance monitoring of the growth and etching of AlAs/GaAs structures in MOVPE [J] . A. Rebey, M.M. Habchi, A. Bchetnia, Journal of Crystal Growth . 2004,第4期

机译：原位反射监测MOVPE中AlAs / GaAs结构的生长和蚀刻
3. In situ monitoring of parasitic growth on the quartz top plate during the MOVPE growth of GaAs/AlGaAs structures [J] . K.J. Weeks, S.J.C. Irvine, S.W. Bland Journal of Crystal Growth . 2003,第1a2期

机译：GaAs / AlGaAs结构的MOVPE生长过程中石英顶板上寄生生长的原位监测
4. Fabrication and characterization of periodic nano-faceting structures on patterned vicinal(110) GaAs substrates by MOVPE [C] . T. Harada, Y. Oda, J. Motohisa, International Microprocesses and Nanotechnology Conference . 2000

机译：MOVPE上图案纳米型（110）GaAs基板上的周期纳米刻面结构的制造与表征
5. In-situ health monitoring technique for composite structures utilizing embedded thermal fiber optic sensors. [D] . Stewart, Anna Kristina. 2004

机译：利用嵌入式热光纤传感器的复合结构的现场健康监测技术。
6. Real-time in situ study of femtosecond-laser-induced periodic structures on metals by linear and nonlinear optics [O] . Jihua Zhang, Yizhuo He, Billy Lam, -1

机译：飞秒激光诱导的金属周期性结构的线性和非线性光学实时研究
7. In situ monitoring of Laser Induced Periodic Surface Structures formation on polymer films by Grazing Incidence Small Angle X-ray Scattering [O] . Rebollar, Esther, Rueda, Daniel R., Martín-Fabiani, Ignacio, 2016

机译：通过掠入射小角度X射线散射原位监测聚合物膜上激光诱导的周期性表面结构形成

In situ monitoring of periodic structures during MOVPE of Ill-nitrides

摘要

著录项

相似文献

相关主题

期刊订阅