3-D time-dependent numerical model of flow patterns within a large-scale Czochralski system

Phil-Ouk Nam; Sang-Kun O; Kyung-Woo Yi

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3-D time-dependent numerical model of flow patterns within a large-scale Czochralski system

机译：大型切克劳斯基系统中与时间相关的3-D数值模型

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Silicon single crystals grown through the Czochralski (Cz) method have increased in size to 300 mm, resulting in the use of larger crucibles. The objective of this study is to investigate the continuous Cz method in a large crucible (800 mm), which is per

机译：通过切克劳斯基（Czchralski）（Cz）方法生长的硅单晶的尺寸已增加到300毫米，从而导致使用更大的坩埚。这项研究的目的是研究一个大坩埚（800毫米）中的连续Cz方法，

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来源
《Journal of Crystal Growth》 |2008年第9期|p.2126-2133|共8页
作者
Phil-Ouk Nam; Sang-Kun O; Kyung-Woo Yi;
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作者单位

Department of Materials Science and Engineering, Seoul National University, Seoul 151-744, Republic of Korea;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
原文格式 PDF
正文语种 eng
中图分类晶体学;
关键词
A1. Thermal wave; A2. Czochralski; A3. Wood's metal;

机译：A1。热波;A2。佐克拉尔斯基;A3。木材的金属;

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3-D time-dependent numerical model of flow patterns within a large-scale Czochralski system

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