Temperature homogeneity of polysilicon rods in a Siemens reactor

G. del Coso; I. Tobias; C. Canizo; A. Luque

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Temperature homogeneity of polysilicon rods in a Siemens reactor

机译：西门子反应堆中多晶硅棒的温度均匀性

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摘要

Siemens process productivity can be limited by non-homogeneous temperature profile in polysilicon rods. To overcome this limitation high-frequency current sources have been proposed. An analysis is presented which, based on electromagnetic and heat transfer theory, studies temperature and current density profiles within the rods. Two linked differential equations have been numerically solved by use of non-linear methods. The solution of these equations shows that by means of an increase in current frequency, skin effect takes place, heat generation in the inner part of the rod is decreased and therefore temperature homogeneity increases. The effect of the reflectivity of reactor walls is also analysed and reveals that temperature homogeneity can be improved by minimizing radiation losses better than by heating with high-frequency current sources.

机译：多晶硅棒中的非均匀温度曲线可能会限制Siemens的生产效率。为了克服该限制，已经提出了高频电流源。提出了一种分析，该分析基于电磁和热传递理论来研究棒内的温度和电流密度分布。通过使用非线性方法，已经数值求解了两个链接的微分方程。这些方程式的解表明，通过增加电流频率，会发生集肤效应，从而减少了棒内部的热量产生，从而提高了温度均匀性。还分析了反应堆壁反射率的影响，发现与通过高频电流源加热相比，通过将辐射损失最小化，可以改善温度均匀性。

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来源
《Journal of Crystal Growth》 |2007年第1期|165-170|共6页
作者
G. del Coso; I. Tobias; C. Canizo; A. Luque;
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作者单位

Instituto de Energia Solar, Universidad Politecnica de Madrid, E. T. S. I. Telecomunicacion, Ciudad Universitaria, 28040 Madrid, Spain;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
原文格式 PDF
正文语种 eng
中图分类晶体学;
关键词
A1. heat transfer; A1. magnetic fields; A2. siemens process; B2. semiconducting silicon;

机译：A1。传播热量;A1。磁场;A2。西门子工艺B2。半导体硅;

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1. Effect of Rod Diameters on Flow Pattern and Temperature Profile in Monosilane Siemens Poly-Si Reactor [J] . SOYOUNG JEON, HOSUB JUNG, JONG HOON PARK Molecular crystals and liquid crystals . 2013,第Null期

机译：棒径对甲硅烷西门子多晶硅反应器中流型和温度分布的影响
2. Thermal and electrical behavior of silicon rod with varying radius in a 24-rod Siemens reactor considering skin effect and wall emissivity [J] . Zhifeng Nie, Yangmin Zhou, Jiushuai Deng, International Journal of Heat and Mass Transfer . 2017,第auga期

机译：考虑集肤效应和壁发射率的24杆西门子反应堆中半径变化的硅棒的热和电行为
3. Prediction of thermal and electrical behavior of silicon rod for a 48-rod Siemens reactor by direct current power [J] . Zhifeng Nie, Jiushuai Deng, Yangmin Zhou, International communications in heat and mass transfer . 2017,第nova期

机译：用直流电预测48棒西门子反应堆中硅棒的热和电行为
4. Increase on Siemens Reactor Throughput by Tailoring Temperature Profile of Polysilicon Rods [C] . del Coso, G., del Canizo, . 2007

机译：通过调整多晶硅棒的温度曲线来提高西门子反应堆的产量
5. Benchmark of CFD Simulations Using Temperatures Measured Within an Enclosed Array of Heater Rods Oriented Vertically and Horizontally. [D] . Chalasani, Narayana Rao. 2010

机译：使用在垂直和水平方向上的加热棒的封闭阵列中测得的温度进行CFD模拟的基准测试。
6. Piezoresistive Sensitivity Linearity and Resistance Time Drift of Polysilicon Nanofilms with Different Deposition Temperatures [O] . Changzhi Shi, Xiaowei Liu, Rongyan Chuai 2009

机译：不同沉积温度下多晶硅纳米薄膜的压阻灵敏度线性和电阻时间漂移
7. Design and Process control of Siemens polysilicon CVD reactor [O] . A. Swetha Priya, S. Vinod Kumar, Sibin K. Mathew, 2015

机译：西门子多晶硅CVD反应器的设计与过程控制
8. Development of a polysilicon process based on chemical vapor deposition of dichlorosilane in an advanced Siemen's reactor [R] . Mccormick, J. R., Arvidson, A. N., Sawyer, D. H., 1984

机译：在先进的西门子反应堆中开发基于二氯硅烷化学气相沉积的多晶硅工艺

Temperature homogeneity of polysilicon rods in a Siemens reactor

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