首页> 外文期刊>Journal of Crystal Growth >Homoepitaxial growth of Ti-Si-C MAX-phase thin films on bulk Ti_3SiC_2 substrates
【24h】

Homoepitaxial growth of Ti-Si-C MAX-phase thin films on bulk Ti_3SiC_2 substrates

机译:Ti-Si-C MAX相薄膜在块体Ti_3SiC_2衬底上的同质外延生长

获取原文
获取原文并翻译 | 示例
           

摘要

Ti_3SiC_2 films were grown on polycrystalline Ti_3SiC_2 bulk substrates using DC magnetron sputtering. The crystallographic orientation of the film grains is shown to be determined by the respective substrate-grain orientation through homoepitaxial MAX-phase growth. For a film composition close to Ti:Si:C = 3:1:2, the films predominantly consist of MAX phases, both Ti_3SiC_2 and the metastable Ti_4SiC_3. Lower Si content resulted in growth of TiC with Ti_3SiC_2 as a minority phase. Thus, MAX-phase heterostructures with preferred crystallographic relationships can also be realized.
机译:使用直流磁控溅射在多晶Ti_3SiC_2块状衬底上生长Ti_3SiC_2膜。薄膜晶粒的结晶取向显示为通过同质外延MAX相生长的相应基材晶粒取向确定。对于接近Ti:Si:C = 3:1:2的膜组成,膜主要由MAX相组成,即Ti_3SiC_2和亚稳Ti_4SiC_3。较低的Si含量导致以Ti_3SiC_2为少数相的TiC的生长。因此,也可以实现具有优选的晶体学关系的MAX相异质结构。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号